References
- J. H. Park, “A study on the design and fabrication of electrostatically actuated RF MEMS switches”, J. Kor. Sensors Soc., vol. 19, no. 4, pp. 320-327, 2010. https://doi.org/10.5369/JSST.2010.19.4.320
- J. Lee, C. H. Je, S. Kang, and C. A. Choi, “A low-losssingle-pole six-throw switch based on compact RFMEMS switches”, IEEE Trans. Microw. Theory Tech.,vol. 53, no. 11, pp. 3335-3344, 2005. https://doi.org/10.1109/TMTT.2005.855746
- S. Kang, Y. Jang, H. C. Kim, and K. Chun, “Wafer-levelpackage of RF MEMS switch using Au/Sn eutecticbonding and glass dry etch”, Journal of Sensor Scienceand Technology, vol. 20, no. 1, pp. 58-63, 2011. https://doi.org/10.5369/JSST.2011.20.1.58
- G. L. Tan, R. E. Mihailovich, J. B. Hacker, J. F.DeNatale, and G. M. Rebeiz, “Low-loss 2- and 4-bitTTD MEMS phase shifters based on SP4T switches”,IEEE Trans. Microw. Theory Tech., vol. 51, no. 1, pp.297-304, 2003. https://doi.org/10.1109/TMTT.2002.806509
- A. Q. Liu, W. Palei, M. Tang and A. Alphones,“Single-pole-four-throw switch using high-aspect- ratiolateral switches”, Electronics Letters, vol. 40, no. 18,pp. 1125-1126, 2004. https://doi.org/10.1049/el:20045718
- S. Pranonsatit, G. Hong, A. S. Holmes and S. Lucyszyn,“Rotary RF MEMS switch based on the wobble motorprinciple”, Proc. MEMS 2006, pp. 886-889.
- S. Kang, H. C. Kim, and K. Chun, “A low-loss, singlepole,four-throw RF MEMS switch driven by a doublestop comb drive”, Journal of Micromech. andMicroeng., vol. 19, no. 3, pp. 035011, 2009. https://doi.org/10.1088/0960-1317/19/3/035011
- S. Lee, J. M. Kim, Y. K. Kim and Y. Kwon, “A singlepolenine-throw antenna switch using radio-frequencymicroelectromechanical systems technology forbroadband multi-mode and multi-band front-ends”, J.Micromech. Microeng., vol. 18, no. 1, pp. 015012,2008. https://doi.org/10.1088/0960-1317/18/1/015012