반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

근접장 전기방사 방식을 이용한 Ag 미세 패턴 형성

A Study on fabrication of the Ag fine pattern using Near Field Electro Spinning(NFES)

  • 심효선 (한국기술교육대학교 전기.전자.통신공학과) ;
  • 서화일 (한국기술교육대학교 전기.전자.통신공학과) ;
  • 윤두협 (한국전자통신연구원)
  • Sim, Hyo-Sun (Dept. of Electrical &Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Seo, Hwa-Il (Dept. of Electrical &Electronic & Communication Engineering, Korea University of Technology and Education) ;
  • Youn, Doo-Hyeb (Electronics and Telecommunications Research Institute)
  • 투고 : 2011.11.10
  • 심사 : 2011.12.15
  • 발행 : 2011.12.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

These days, printed electronics attract attention from electronics industry. In this paper, the fabrication of the fine patterns by Near Field Electro Spinning (NFES) was studied by using Ag ink on silicon wafer (substrate). Two types of ink, the high viscous ink Ag-200 and low viscous ink Ag-15, were used. The fine and uniform patterns were easily fabricated by using Ag-200 because jet breakup is less occurred in high viscosity solution. As increasing flow rate of solution, aspect ratio of Ag pattern decreased. And there was optimum applied voltage for fine pattern. In case of Ag-200, the optimum applied voltage was about 2.02KV. When pattern was fabricated by NFES, the pattern width and height were affected by many factors such as viscosity, flow rate of solution, applied voltage etc.

키워드

참고문헌

  1. (주)전자자료사, "Semiconductor & Display Korea, 월간: 반도체.FPD", (주)전자자료사, 279호, p. 50, 2011
  2. 지식경제부, "나노 전자부품용 다이렉트 나노패터닝 시스템개발(연구기획 최종 보고서)", pp. 6-68, 2008.
  3. 한성옥, "전기방사법에 의한 나노화이버 제조 및 나노복합재료에의 응용", 한국에너지기술연구원 ETIS 분석지 제24권, pp. 3-4.
  4. J.L.Li, "EHD sprayings induced by the pulsed voltage superimposed to a bias voltage", ScienceDirect Journal of Electrostatics 65, pp. 750-757, 2007. https://doi.org/10.1016/j.elstat.2007.06.005
  5. 지식경제부, "근접장 전기방사 방식 직접인쇄 공정기술 및 장비에 관한 기술개발(최종 보고서)", pp. 31-33, 2010.
  6. Doo-Hyeb Youn, Seong-Hyun Kim, Yong-Suk Yang, Sang-Chul Lim, Seong-Jin Kim, Su-Han Ahn, Hyo-Sun Sim, Seung-Myoung Ryu, Dong-Wook Shin, and Ji-Beom Yoo, "Electrohydrodynamic micropatterning of silver ink using near-field electrohydrodynamic jet printing with tilted-outlet nozzle", Applied Physics A, DOI 10.1007/s00339-009-5262-7, 2009.
  7. Dae-Young Lee, Yun-Soo Shin, Sung-Eun Park, Tae-U Yu, and Jung-Ho Hwang, "Electrohydrodynamic printing of silver nanoparticle by using a focused nanocolloid jet", Applied physics letters 90, 081905, 2007. https://doi.org/10.1063/1.2645078
  8. 유재훈, 이대영, 황정호, "핀-핀 타입 전기-수력학 프린팅에서 전극 직경 및 유량 변화에 따른 세라믹 나노입자 잉크 패턴의 형상 변화", (사)한국입자에어로졸학회, pp. 163-170, 2006
  9. J.H.Yu, S.Y.Kim, and J.Hwang, "Effect of viscosity of silver nanoparticle suspension on conductive line patterned by electrohydrodynamic jet printing", Applied Physics A 89, pp. 157-159, 2007. https://doi.org/10.1007/s00339-007-4210-7
  10. S-H.Tan, R.Inai, M.Koraki, and S.Ramakrishna, "Systematic parameter study for ultra-fine fiber fabrication via electrospinning process", Science direct polymer 46, pp. 6128-6134, 2005.
  11. Tran, Si Bui Quang, "Theoretical and Experimental Studies of Meniscus Behavior and Electrical Interference in Electrohydrodynamic(EHD) Spraying", Graduate school of KonKuk university, pp. 10-34, 2010.
  12. Chieh Chang, Kevin Limkrailassiri, and Liwei Lin, "Continuous near-field electrospinning for large area deposition of orderly nanofiber patterns", Applied physics letters 93, 123111, 2008. https://doi.org/10.1063/1.2975834