Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on How to Predict and Evaluate the Dynamic Stiffness Criteria of Exposure Equipment in Precision Industrial Factory(TFT-LCD)

정밀산업(TFT-LCD) 공장 내 노광장치의 대형 세대별 동강성 허용규제치 예측 및 평가에 관한 연구

  • Baek, Jae-Ho (Graduate School, Department of Mechanical Engineering, Sun Moon University) ;
  • Chun, Chong-Keun (Department of Mechanical Engineering, Sun Moon University) ;
  • Park, Sang-Gon (Graduate School, Department of Mechanical Engineering, Sun Moon University)
  • Received : 2011.10.12
  • Accepted : 2011.12.15
  • Published : 2011.12.31
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Abstract

The lithography system installed inside precision industry's (e.g. TFT-LCD) production factories are increasing in size, thereby increasing its dynamic load along with it. Such condition causes vibration within the area where the system is installed, which then negatively affects the production line to produce defective products. To prevent this type of situation, the facilities should adopt dynamic design that considers the lithography system's dynamic load. This study predicts the maximum value allowed for dynamic stiffness (which is a ratio of vibration response against a single unit of the dynamic load) of the lithography system and explains the result of its application on actual structures inside the facilities.

Keywords

References

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