Tribology and Lubricants

  • 제27권5호
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  • Pages.249-255
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  • 2011
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  • 2713-8011(pISSN)
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  • 2713-802X(eISSN)
한국트라이볼로지학회 (Korean Tribology Society)
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마모가 SAW 모터 구동특성에 미치는 영향

The Effect of Wear on the SAW Motor Driving Characteristics

  • Moon, Bong-Ho (School of Mechanical and Automotive Engineering, College of Engineering Science, Chonnam National University)
  • 투고 : 2011.05.25
  • 심사 : 2011.07.18
  • 발행 : 2011.10.31
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초록

Recently the demand for a fast and precise actuator in semiconductor industries is growing larger. A SAW motor is now expected as a new friction-drive actuator to meet such demand. However, its friction and wear properties are almost unknown and its low stability and reliability still remain to be solved. In this research the tests of SAW motor were carried out and its durability was discussed. The effect of wear caused by friction on the driving force and driving speed were clarified.

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참고문헌

  1. 심영일, "새로운 액추에이터 초음파 모터의 개발," 기계산업, 제338권, pp. 76-80, 2005.
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  3. M. K. Kurosawa, M.Takahashi, and T. Higuchi, "Elastic Contact Conditions to Optimize Friction Drive of Surface Acoustic Wave Motor," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 45, No. 5, pp. 1229-1237, 1998. https://doi.org/10.1109/58.726448
  4. Takashi Shigematsu, Minoru Kuribayashi Kurosawa, "Friction Drive of an SAW Motor. Part I: Measurements," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 55, No. 8, pp. 2016-2024, 2008. https://doi.org/10.1109/TUFFC.892
  5. Takashi Shigematsu, Minoru Kuribayashi Kurosawa, "Friction Drive of an SAW Motor. Part II: Analyses," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 55, No. 8, pp. 2266-2276. 2008. https://doi.org/10.1109/TUFFC.925
  6. Takashi Shigematsu, Minoru Kuribayashi Kurosawa, "Friction Drive of an SAW Motor. Part III: Modeling," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 55, No. 10, pp. 2266-2276, 2008. https://doi.org/10.1109/TUFFC.925
  7. Takashi Shigematsu and Minoru Kuribayashi Kurosawa, "Friction Drive of an SAW Motor. Part IV: Physics of Contact," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 55, No. 10, pp. 2277-2287, 2008. https://doi.org/10.1109/TUFFC.926
  8. Takashi Shigematsu and Minoru Kuribayashi Kurosawa, "Friction Drive of an SAW Motor. Part V: Design Criteria," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 55, No. 10, pp. 2288-2297, 2008. https://doi.org/10.1109/TUFFC.927