References
- A. Rogalski, “Infrared detectors: status and trends,” Progress in Quantum Electronics, Vol. 27, pp. 59-210, 2003. https://doi.org/10.1016/S0079-6727(02)00024-1
- H.-K. Lee, J.-B. Yoon, E. Yoon, S.-B. Ju, Y.-J. Yong, W. Lee, and S.-G. Kim, “A high fill-factor infrared bolometer using micromachined multilevel electrothermal structures,” IEEE Trans. Elec. Dev., Vol. 46, pp. 1489-1491, 1999. https://doi.org/10.1109/16.772496
- C. Chen, X. Yi, J. Zhang, and X. Zhao, “Linear uncooled microbolometer array based on VOx thin films,” Infrared Physics & Tech., Vol. 42, pp. 87-90,2001. https://doi.org/10.1016/S1350-4495(01)00058-5
- S. Eminoglu, D. S. Tezcan, M. Y. Tanrikulu, and T. Akin, “Low-cost uncooled infrared detectors in CMOS process,” Sensors & Actuators, Vol. A109, pp. 102-113, 2003.
- R. A. Wood, “High performance infrared thermal imaging with monolithic silicon focal planes operating at room temperature,” in Proceedings of IEEE IEDM, 1993.
- S. Han, C. Chun, C. Han, and S. Park, “Coupled physics analyses of VOx-based, three-level microbolomter,” Electron. Mater. Lett., Vol. 5, pp. 63-65, 2009. https://doi.org/10.3365/eml.2009.06.063
- J. A. Potkay, G. R. Lambertus, R. D. Sacks, and K. D. Wise, “A low-power pressure- and temperatureprogrammable GC column,” in Proceedings of Solid- State Sensor, Actuator and Microsystem Workshop, 2006.
- B. E. Cole, R. E. Higashi, and R. A. Wood, “Monolithic arrays of micromachined pixels for infrared applications,” in Proceedings of IEEE IEDM, 1998.
- P. W. Kruse and D. D. Skatrud, Uncooled infrared imaging arrays and systems: Academic Press, 1997.
- H. H. Jones, S. Aslam, and B. Lakew, “Bolometer simulation using SPICE,” in Proceedings of Int. Thermal Detectors Workshop, 2004.
- D. Yvon and V. Sushkov, “Low Noise Cryogenic Electronics: Preamplifier configurations with feedback on the bolometer,” IEEE Trans. Nuclear Sci., Vol. 47, pp. 428-437, 2000. https://doi.org/10.1109/23.846276
- J. Shie, Y. Chen, M. Ou-Yang, and B. Chou, “Characterization and modeling of metal-film microbolometer,” J. MEMS, Vol. 5, pp. 298-306, 1996. https://doi.org/10.1109/84.546409
- P. Capper and C. T. Elliott, Infrared detectors and emitters: materials and devices, Kluwer Academic Publishers, 2001.
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