Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on the Fabrication of Nano Pattern using a Nickel Stamper Replicated from Anodic Aluminum Oxide

Anodic Aluminum Oxide 기반 니켈 스탬퍼를 이용한 나노패턴 성형에 관한 연구

  • Received : 2010.12.27
  • Accepted : 2011.01.14
  • Published : 2011.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

For the fabrication of nano patterned products manufacturing a nano patterned mold is needed in advance. The nano patterned stamper was fabricated by electroforming the AAO master with nickel. The surface of nickel-plated stamper had nano-patterned holes with the diameter of 73 nm and the depth of 83 nm. Hot embossing was used for forming P3HT sheet and the process factors of hot embossing were closer as pressure, temperature and time. In the present paper hot embossing experiments were performed to find the main process conditions to affect the replication ratio of nano patterns on surface of P3HT sheet. As a result, main contributing factors for the replication ratio of hot embossed pattern could be sequentially enumerated as pressure, temperature and time.

Keywords

Acknowledgement

Supported by : 한국에너지기술평가원(KETEP)

References

  1. S. Kurtz, 2009, Opportunities and challenges for development of a mature concentrating photovoltanic power industry, NREL technical report.
  2. S. J. Baek, J. B. Park, W. J. Lee, S. H. Han, J. H. Lee, S. H. Lee, 2009, A facile method to prepare regioregular poly(3-hexylthiophene) nanorod arrays using anodic aluminum oxide template and capillary force, New J. Chem., Vol. 33, pp. 986-990. https://doi.org/10.1039/b821288k
  3. S. H. Jeong, S. H. Jung, K. H. Lee, 2005, Preperation of Anodic Alumina Nanotemplate and its Applications, J. Kor. Ind. Eng. Chem, Vol. 16, pp 461-473.
  4. J. T. Kwon, H. G. Shin, Y. H. Seo, B. H. Kim, H. G. Lee, J. S. Lee, 2009, Simple fabrication method of hierarchical nano-pillars using aluminum anodizing processes, Curr. Appl. Phys., pp. 81-85. https://doi.org/10.1016/j.cap.2008.12.034
  5. J. G. Oh, J. S. Kim, J. J. Kang, J. D. Kim, K. H. Yoon, C. J. Hwang, 2010, A Study on the Fabrication of Nano-Pattern Mold Using Anodic Aluminum Oxide Membrane, Trans. Mater. Process., Vol. 19, pp. 73-78. https://doi.org/10.5228/KSPP.2010.19.2.073
  6. S. Y. Chou, P. R. Krauss, P. J. Renstrom, 1996, Imprint Lithography, J. Vac. Technol. B, pp, 4129- 4133.