Clean Technology (청정기술)

The Korean Society of Clean Technology (한국청정기술학회)
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Large Scale Treatment of Perfluorocompounds Using a Thermal Plasma Scrubber

  • Han, Sung-Han (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University) ;
  • Park, Hyun-Woo (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University) ;
  • Kim, Tae-Hee (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University) ;
  • Park, Dong-Wha (Department of Chemical Engineering and RIC-ETTP (Regional Innovation Center for Environmental Technology of Thermal Plasma), INHA University)
  • Received : 2011.06.10
  • Accepted : 2011.08.12
  • Published : 2011.09.30
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Abstract

Thermal plasma has been presented for the decomposition of perfluorocompounds (PFCs) which are extensively used in the semiconductor manufacturing and display industry. We developed pilot-scale equipment to investigate the large scale treatment of PFCs and called it a "thermal plasma scrubber". PFCs such as $CF_4$, $C_2F_6$, $SF_6$, and $NF_3$ used in experiments were diluted with $N_2$. There were two different types of experiment setup related to the water spray direction inside the thermal plasma scrubber. The first type was that the water was sprayed directly into the gas outlet located at the exit of the reaction section. The second type was that the water was sprayed on the wall of the quenching section. More effective decomposition took place when the water was sprayed on the quenching section wall. For $C_2F_6$, $SF_6$, and $NF_3$ the maximum destruction and removal efficiency was nearly 100%, and for $CF_4$ was up to 93%.

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References

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