센서학회지 (Journal of Sensor Science and Technology)

  • 제20권6호
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  • Pages.406-411
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  • 2011
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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수열합성법으로 제조된 Co3O4 분말을 사용한 후막 가스센서의 가스감지 특성

The Gas Sensing Properties of Thick Film Gas Sensor Using Co3O4 Powder Prepared by Hydrothermal Reaction Method

  • 김광희 (경상대학교 공과대학 반도체공학과) ;
  • 김정규 (경상대학교 공학연구원, 경상대학교 공과대학 반도체공학과) ;
  • 박기철 (경상대학교 공학연구원, 경상대학교 공과대학 반도체공학과)
  • 투고 : 2011.09.28
  • 심사 : 2011.11.01
  • 발행 : 2011.11.30
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초록

$Co_3O_4$ thick film gas sensor using the powder prepared by hydrothermal reaction method(HRM) was fabricated. For comparison study, we also prepared the sensor using commercial $Co_3O_4$ powder under the same fabrication conditions. Sensitivity, time response, and selectivity of them to variable gases such as iso-$C_4H_{10}$, CO, $NH_3$, and $CH_4$ were investigated. The sensor from the powder prepared by HRM showed higher sensitivity to every gas than those from commercial powder. For iso-$C_4H_{10}$ gas, the sensitivities of both sensor to 100 ppm are 160 % and 40 %, respectively. Time response and selectivity of the sensor using the powder prepared by HRM were better than those of the sensor using commercial powder.

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