Journal of Electrical Engineering and Technology

  • 제6권5호
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  • Pages.688-692
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  • 2011
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  • 1975-0102(pISSN)
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  • 2093-7423(eISSN)
대한전기학회 (The Korean Institute of Electrical Engineers)
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Atomic Layer Deposition-incorporated Catalyst Deposition for the Vertical Integration of Carbon Nanotubes

  • 투고 : 2010.12.22
  • 심사 : 2011.03.17
  • 발행 : 2011.09.01
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초록

Carbon nanotubes (CNTs) are vertically grown inside high-aspect-ratio vertical pores of anodized aluminum oxide. A CNT catalyst layer is introduced by atomic layer deposition to the bottom of the pores, after which the CNTs are successfully grown from the layer using chemical vapor deposition. The CNTs formed a complete vertical conductive path. The conductivity of the CNT-vertical path is also measured and discussed. The present atomic layer deposition-incorporated catalyst deposition is predicted to enable the integration of CNTs with various challenging configurations, including high-aspect-ratio vertical channels or vertical interconnects.

키워드

참고문헌

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피인용 문헌

  1. Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co 3 O 4 and Co 3 O 4 /Fe 2 O 3 catalyst films vol.121, 2017, https://doi.org/10.1016/j.carbon.2017.06.001