Development of a Hybrid DPSSL with a Pulse Parameter Variable LD Seed

광펄스 파라미터 가변 LD를 이용한 복합형 DPSSL 개발

  • 노영철 (광주과학기술원 고등광기술연구소) ;
  • 신우진 (광주과학기술원 고등광기술연구소) ;
  • 유봉안 (광주과학기술원 고등광기술연구소) ;
  • 이영락 (광주과학기술원 고등광기술연구소) ;
  • 정창수 (광주과학기술원 고등광기술연구소)
  • Received : 2010.08.11
  • Accepted : 2010.08.27
  • Published : 2010.10.01

Abstract

We report a hybrid DPSSL with a pulse parameter variable LD seed, all-fiberized polarization-maintained pulsed Yb-doped fiber preamplifier chains, and a bulk Nd:$YVO_4$ power amplifier. Pulse parameter of LD seed was controlled by direct current modulation. The hybrid DPSSL generates 1064 nm laser pulses with an average power of 40W, a pulse duration of 20-40ns, and a repetition rate of 100-500kHz.

Keywords

References

  1. Pronko, P. P., Dutta, S. K., Squier, J., Rudd, J, V., Du, D. and Mourou, G., "Machining of sub-micron holes using a femtosecond laser at 800 nm," Opt. Comm., Vol. 114, No. 1, pp. 106-110, 1995. https://doi.org/10.1016/0030-4018(94)00585-I
  2. Korte, F., Serbin, J., Koch, J., Egbert, A., Fallnich, C., Ostendorf, A. and Chichkov, B. N., "Towards nanostructuring with femtosecond laser pulses," Appl. Phys. A, Vol. 77, No. 2, pp. 229-235, 2003.
  3. Sohn, I.-B., Ko, M.-J., Kim, Y. S. and Noh, Y.-C., "Femtosecond laser lithography for maskless PR patterning," Journal of the Korean Society for Precision Engineering, Vol. 26, No. 6, pp. 36-41, 2009.
  4. Bae, H. S., Park, H. C., Ryu, K. H. and Nam, G. J., "Study on high speed laser cutting of rigid flexible printed circuit board by using UV laser with nanosecond pulse width," Journal of the Korean Society for Precision Engineering, Vol. 27, No. 2, pp. 20-24, 2010.
  5. Lee, Y.-H. and Choi, K.-J., "Analysis of silicon via hole drilling for wafer level chip stacking by UV Laser," International Journal of Precision Engineering and Manufacturing, Vol. 11, No. 4, pp. 501-507, 2010. https://doi.org/10.1007/s12541-010-0055-7
  6. Urata, Y., Shinozaki, T., Wada, Y., Kaneda, Y., Wada, S. and Imai, S., "Deep UV light generation by a fiber/bulk hybrid amplifier at 199 nm," Appl. Opt., Vol. 48, No. 9, pp. 1668-1674, 2009. https://doi.org/10.1364/AO.48.001668
  7. Starodoumov, A. N., Dudley, D., McLean, S., Steinmetz, A. and Hodgson, N., "Hybrid fiber MOPA-bulk amplifier system for frequency conversion," Proc. of SPIE, Vol. 6871, pp. 68710V-1-68710V-8, 2008.