한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제43권3호
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  • Pages.148-153
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  • 2010
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
DOI QR코드

DOI QR Code

GZO/Metal/GZO 하이브리드 구조 투명 전도막의 전기적, 광학적 특성; Ag, Cu, Al, Zn 금속 삽입층의 효과

Electrical and Optical Properties of Transparent Conducting Films having GZO/Metal/GZO Hybrid-structure; Effects of Metal Layer(Ag, Cu, Al, Zn)

  • 김현범 (한국기계연구원 부설 재료연구소 기능박막연구그룹) ;
  • 김동호 (한국기계연구원 부설 재료연구소 기능박막연구그룹) ;
  • 이건환 (한국기계연구원 부설 재료연구소 기능박막연구그룹) ;
  • 김광호 (부산대학교 국가핵심연구센터 하이브리드 소재 솔루션)
  • Kim, Hyeon-Beom (Functional Coatings Research Group, Korea Institute of Materials Science(KIMS)) ;
  • Kim, Dong-Ho (Functional Coatings Research Group, Korea Institute of Materials Science(KIMS)) ;
  • Lee, Gun-Hwan (Functional Coatings Research Group, Korea Institute of Materials Science(KIMS)) ;
  • Kim, Kang-Ho (Hybrid Materials Solution, National Core Research Center, Pusan National University)
  • 투고 : 2010.04.27
  • 심사 : 2010.06.29
  • 발행 : 2010.06.30
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초록

Transparent conducting films having a hybrid structure of GZO/Metal/GZO were prepared on glass substrates by sequential deposition using DC magnetron sputtering. Silver, copper, aluminum and zinc thin films were used as the intermediate metal layers in the hybrid structure. The electrical and optical properties of hybrid transparent conducting films were investigated with varying the thickness of metal layer or GZO layers. With increasing the metal thickness, hybrid films showed a noticeable improvement of the electrical conductivity, which is mainly dependent on the electrical property of the metal layer. GZO(40 nm)/Ag(10 nm)/GZO(40 nm) film exhibits a resistivity of $5.2{\times}10^{-5}{\Omega}{\cdot}cm$ with an optical transmittance of 82.8%. For the films with Zn interlayer, only marginal reduction in the resistivity was observed. Furthermore, unlike other metals, hybrid films with Zn interlayer showed a decrease in the resistivity with increasing the GZO thickness. The optimal thickness of GZO layer for anti-reflection effect at a given thickness of metal (10 nm) was found to be critically dependent on the refractive index of the metal. In addition, x-ray diffraction analysis showed that the insertion of Ag layer resulted in the improvement of crystallinity of GZO films, which is beneficial for the electrical and optical properties of hybrid-type transparent conducting films.

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