블록공중합체 필름에서 나노 패터닝

Nanoscale Pattering in Block Copolymer Thin Films

  • 박수진 (울산과학기술대학교 친환경에너지공학부) ;
  • 조희숙 (울산과학기술대학교 친환경에너지공학부)
  • Park, Soo-Jin (Interdisciplinary School of Green Energy, Ulsan National Institute of Science and Technology) ;
  • Cho, Hee-Sook (Interdisciplinary School of Green Energy, Ulsan National Institute of Science and Technology)
  • 발행 : 2010.04.25