Information Display (인포메이션 디스플레이)

The Korean Infomation Display Society (한국정보디스플레이학회)
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마이크로크리스탈 실리콘 기술 동향

  • 홍완식 (서울시립대학교 나노과학기술학과)
  • Published : 2010.04.30
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Abstract

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References

  1. Z.Iqbal, A.P.Webb, S.Veprek, Appl. Phys. Lett. 35, 163 (1980)
  2. M.Kondo, M.Fukawa, L.Guo, A.Matsuda, J. Non-Cryst. Solids 266-269, 84 (2000)
  3. P.Hapke, F.Finger, J. Non-Cryst. Solids 227-230, 861 (1998)
  4. J.P.Conde, P.Alpuim, J.Gaspar, V.Chu, Thin Solid Films 395, 105 (2001)
  5. Z.Iqbal, S.Veprek, A.P.Webb, Solid State Comm. 37, 993 (1981) https://doi.org/10.1016/0038-1098(81)91202-3
  6. S.Veprek, Z.Iqbal, H.R.Oswald, J. Phys. C 14, 295 (1981) https://doi.org/10.1088/0022-3719/14/3/013
  7. S.Veprek, Z.Iqbal, H.R.Oswald, Solid State Comm. 39, 509 (1981) https://doi.org/10.1016/0038-1098(81)90650-5
  8. H.Richter, L.Ley, J. Appl. Phys. 52, 7281 (1981) https://doi.org/10.1063/1.328715
  9. H.Richter, Z.P.Wang, L.Ley, Solid State Comm. 39, 625 (1981) https://doi.org/10.1016/0038-1098(81)90337-9
  10. H.Curtins, Solid State Comm. 57, 215 (1986) https://doi.org/10.1016/0038-1098(86)90142-0
  11. J.K.Gimzewski, A.Humbert, D.W.Pohl, Surf. Sci. 168, 795 (1986) https://doi.org/10.1016/0039-6028(86)90911-8
  12. L.Brus, J.Phys.Chem. 98, 3575 (1994) https://doi.org/10.1021/j100065a007
  13. S.Oda, Adv. Colloid Interface Sci. 71/72, 31 (1997) https://doi.org/10.1016/S0001-8686(97)90008-7
  14. A.Matsuda, Thin Solid Films 337, 1 (1999) https://doi.org/10.1016/S0040-6090(98)01165-1
  15. M.Yoon, K.Im, J.Yang, S.Lim, Physica B. 405, 1526 (2010) https://doi.org/10.1016/j.physb.2009.12.034
  16. P.C.P.Bronsveld, H.J.van der Wagt, J.K.Rath, R.E.I.Schropp, W.Beyer, Thin Solid Films 515, 7495 (2007) https://doi.org/10.1016/j.tsf.2006.11.158
  17. T.Pier, K.Kandoussi, C.Simon, N.Coulon, T.Mohammed-Brahim, H.Lhermite, Phys. Stat. Sol. 5, 3234 (2008) https://doi.org/10.1002/pssc.200879513
  18. A.Tabata, K.Okada, Y.Suzuoki, T.Mizutani, Thin Solid Films, 491, 148 (2005) https://doi.org/10.1016/j.tsf.2005.06.093
  19. H.R.Moutinho, C.S.Jian, J.Perkins, Thin Solid Films, 430, 135 (2003) https://doi.org/10.1016/S0040-6090(03)00096-8
  20. I.C.Hsieh, S.Y.Lien, D.S.Wuu, Thin Solid Films, 473, 169 (2005) https://doi.org/10.1016/j.tsf.2004.08.008
  21. T.Pier, K.Kandoussi, C.Simon, N.Coulon, T.Mohammed-Brahim, H.Lhermite, J. Non-Cryst. Solids, 354, 2300 (2008) https://doi.org/10.1016/j.jnoncrysol.2007.10.087
  22. K.Saitoh, M.Kondo, M.Fukawa, Appl. Phys. Lett. 71 3403 (1997) https://doi.org/10.1063/1.120324
  23. H.Shirai, J.Hanna, I.Shimizu, Jap. J. Appl. Phys. 30, L679 (1991) https://doi.org/10.1143/JJAP.30.L679
  24. A.Matsuda, T.Goto, Mat. Res. Soc. Symp. Proc. 164, 3 (1990)
  25. N.Wang, V.Dalal, Mat. Res. Soc. Symp. Proc. 862, A20.6.1 (2005)
  26. I.Gordon, S.Vallon, A.Mayolet, G.Beaucarne, J.Poortmans, Sol. Energy Mater. Sol. Cells 94, 381 (2010) https://doi.org/10.1016/j.solmat.2009.08.015
  27. J.Kim, W.A.Anderson, Sol. Energy Mater. Sol. Cells 91, 534 (2007) https://doi.org/10.1016/j.solmat.2006.11.009
  28. O.Vetterl, M.Huelsbeck, J.Wolff, R.Carius, F.Finger, Thin Solid Films 427, 46 (2003) https://doi.org/10.1016/S0040-6090(02)01237-3
  29. Y.Minagawa, Y.Yazawa, S.I.Maramatsu, Sol. Energy Mater. Sol. Cells 74, 283 (2002) https://doi.org/10.1016/S0927-0248(02)00086-7
  30. Z.Liu, S.Wang, N.Otogawa, Y.Suzuki, M.Osamura, Y.Fukuzawa, T.Ootsuka, Y.Nakayama, H.Tanoue, Y.Makita, Sol. Energy Mater. Sol. Cells 90, 176 (2006)
  31. Y.Z.Wang, O.O.Awadelkarim, J. Vac. Sci. Technol. A 16, 3352 (1998)
  32. T.Kamiya, K.Ro, C.M.Fortmann, I.Shimizu, Jap. J. Appl. Phys. 38, 5762 (1999) https://doi.org/10.1143/JJAP.38.5762
  33. J.Koh, A.S.Ferlauto, P.I.Rovira, C.R.Wronski, R.W.Collins, Appl. Phys. Lett. 75, 2286 (1999) https://doi.org/10.1063/1.124992
  34. S.Guha, J.Yang, D.L.Williamson, Y.Lubianiker, J.D.Cohen, A.H.Mahan, Appl.Phys.Lett. 74, 1860 (1999) https://doi.org/10.1063/1.123693
  35. R.Goswami, S.Ray, Jap. J. Appl. Phys. 46, 7188 (2007) https://doi.org/10.1143/JJAP.46.7188
  36. P.Roca i Cabarrocas, A.Fontcuberta i Morral, Y.Poissant, Thin Solid Films 403-404, 39 (2002)
  37. A.fontcuberta i Morral, P.Roca i Cabarrocas, Thin Solid Films 383, 161 (2001) https://doi.org/10.1016/S0040-6090(00)01596-0
  38. P.M.Voyles, N.Zotov, S.M.Nakhmanson, D.A.Drabold, J.M.Gibson, M.M.J.Treacy, P.Keblinski, J. Appl. Phys. 90, 4437 (2001) https://doi.org/10.1063/1.1407319
  39. R.Goswami, B.Chowdhury, S.Ray, Thin Solid Films 516, (2008)
  40. P.Roca i Cabarrocas, Mat. Res. Soc. Symp. Proc. 507, 855 (1998)
  41. H.M.Branz, P.Stradins, C.W.Teplin, Mat. Res. Soc. Symp. Proc. 1066, 1066-A01-03 (2008)
  42. C.W.Teplin, C.Jiang, P.Stradins, H.M.Branz, Appl. Phys.Lett. 92, 093114 (2008) https://doi.org/10.1063/1.2891087
  43. C.W.Teplin, E.Iwaniczko, B.To, H.Moutinho, P.Stradins, H.M.Branz, Phys. Rev. B 74, 235428 (2006) https://doi.org/10.1103/PhysRevB.74.235428
  44. E.Vallat-Sauvain, U.Kroll, J.Meier, A.Shah, J.Pohl, J. Appl. Phys. 87, 3137 (2000) https://doi.org/10.1063/1.372311
  45. P.C.P.Bronsveld, A.Verkerk, T.Mates, A.Fejfar, J.K.Rath, R.E.I.Schropp, Mat. Res. Soc. Symp. Proc. 989, 0989-A07-01 (2007)
  46. M.Heinze, R.Zedlitz, G.H.Bauer, Mat. Res. Soc. Symp. Proc. 297, 49 (1993)
  47. U.Kroll, Y.Ziegler, J.Meier, H.Keppner, A.Shah, Mat. Res. Soc. Symp. Proc. 336, 115 (1994)
  48. M.Scheib, B.Schroeder, H.Oechsner, Mat. Res. Soc. Symp. Proc. 420, 437 (1996)
  49. N.Kosku, H.Murakami, S.Higashi, S.Miyazaki, Appl. Surf. Sci. 244, 39 (2004)
  50. M.Ehbrecht, H.Ferkel, F.Huisken, Zeitschrift fur Physik. D, 40,88 (1997) https://doi.org/10.1007/s004600050165
  51. 오경숙, 최성웅, 김대철, 한국신재생에너지학회 2008년 도 춘계학술대회 논문집, 2008.05.22. 394 (2008)
  52. 국가핵융합연구소 홈페이지 http://www.nfri.re.kr/research/ plasma_2_2.php?tab=2