Effects of Electron Beam Irradiation on the Dielectric Properties of Polyimide Films

전자선 조사에 따른 폴리이미드 필름의 유전특성 변화

  • Kim, Hyun Bin (Radiation Research Division for Industry & Environment, Korea Atomic Energy Research Institute) ;
  • Jeun, Joon Pyo (Radiation Research Division for Industry & Environment, Korea Atomic Energy Research Institute) ;
  • Kang, Phil Hyun (Radiation Research Division for Industry & Environment, Korea Atomic Energy Research Institute)
  • 김현빈 (한국원자력연구원 정읍방사선과학연구소) ;
  • 전준표 (한국원자력연구원 정읍방사선과학연구소) ;
  • 강필현 (한국원자력연구원 정읍방사선과학연구소)
  • Received : 2010.08.19
  • Accepted : 2010.09.07
  • Published : 2010.09.30

Abstract

Polyimide films have excellent thermal stability, reliable mechanical properties and low dielectric constant. Therefore, this material is widely used in many industrial fields such as microelectronics, flexible circuits, semiconductor products and aerospace materials. In space applications, earth-orbiting hardware operates in environments that generally include neutral particles, charged particles such as trapped protons and electrons, solar protons, and cosmic rays. Under these conditions, polyimide films were changed in the optical, electrical and mechanical properties. Therefore, in this study, we evaluated the effects of electron beam irradiation on polyimide. The O-H functional groups were created on the polyimide film surface in the results of FT-IR spectra. And it was found that the dielectric constants were changed as a function of electron beam dose.

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Acknowledgement

Supported by : 교육과학기술부