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DFT Study on the Gas Phase Decomposition of Tungsten Imido Guanidinate Complex W(NiPr)Cl3[iPrNC(NMe2)NiPr] for Chemical Vapor Deposition of Tungsten Carbonitride Films

  • Received : 2010.04.07
  • Accepted : 2010.06.15
  • Published : 2010.08.20
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Abstract

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References

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