Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characteristics of SnO2 Thick Film Gas Sensors Doped with Catalyst

촉매가 첨가된 SnO2 후막형 가스센서의 특성 연구

  • Lee, Don-Kyu (Department of Electrical Engineering, Dong-Eui University) ;
  • Yu, Yoon-Sick (Department of Radiological Science, Dong-Eui University and Convergence of IT Devices Institute Busan) ;
  • Lee, Ji-Young (Department of Physics, Dong-Eui University and Convergence of IT Devices Institute Busan) ;
  • Yu, Il (Department of Physics, Dong-Eui University and Convergence of IT Devices Institute Busan)
  • 이돈규 (동의대학교 전기공학과) ;
  • 유윤식 (동의대학교 방사선학과, 부산 IT융합부품연구소) ;
  • 이지영 (동의대학교 물리학과, 부산 IT융합부품연구소) ;
  • 유일 (동의대학교 물리학과, 부산 IT융합부품연구소)
  • Received : 2010.04.27
  • Accepted : 2010.07.23
  • Published : 2010.08.01
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Abstract

Cu doped $SnO_2$ thick films for gas sensors were fabricated by screen printing method on alumina substrates and annealed at $500^{\circ}C$ in air, respectively. Structural properties of $SnO_2$ by X-ray diffraction showed (110), (101) and (211) dominant tetragonal phase. The effects of catalyst Cu in $SnO_2$-based gas sensors were investigated. Sensitivity of $SnO_2$:Cu sensors to 2,000 ppm $CO_2$ gas and 50 ppm $H_2S$ gas was investigated for various Cu concentration. The highest sensitivity to $CO_2$ gas and $H_2S$ gas of Cu doped $SnO_2$ gas sensors was observed at the 8 wt% and 12 wt% Cu concentration, respectively. The improved sensitivity in the Cu doped $SnO_2$ gas sensors was explained by decrease of electron depletion region in Cu and $SnO_2$ junction, and increase of reactive oxygen and surface area in the $SnO_2$.

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References

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