Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on the Fabrication of Nano-Pattern Mold Using Anodic Aluminum Oxide Membrane

양극산화 알루미늄막을 이용한 나노패턴 성형용 금형제작에 대한 연구

  • 오정길 (한국생산기술연구원 융합생산기술연구부) ;
  • 김종선 (한국생산기술연구원 금형기술지원센터) ;
  • 강정진 (한국생산기술연구원 융합생산기술연구부) ;
  • 김종덕 (한국생산기술연구원 금형기술지원센터) ;
  • 윤경환 (단국대학교 기계공학과) ;
  • 황철진 ((주)마이크로몰드 부설연구소)
  • Received : 2009.07.24
  • Accepted : 2009.12.10
  • Published : 2010.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

Recently, many researches on the development of super-hydrophobic surface have been concentrated on the fabrication of nano-patterned products. Nano-patterned mold is a key to replicate nano-patterned products by mass production process such as injection molding and UV molding. The present paper proposes the new fabricating method of nano-patterned mold at low cost. The nano-patterned mold was fabricated by electroforming the anodic aluminum oxide membrane filled with UV curable resin in nano-hole by capillary phenomenon. As a result, the final mold with nano-patterns which have the holes with the diameter of 100~200 nm was fabricated. Furthermore, the UV-molded products with clear nano- patterns which have the pillars with the diameter of 100~200nm were achieved.

Keywords

References

  1. A. Tuteja, W. Choi, M. Ma, J. A. Mabry, S. A. Mazzella, G. C. Rutledge, G. H. Mckinley, R. E. Cohen, 2007, Designing Superoleophobic Surfaces, Science, Vol. 318, pp. 1618-1622. https://doi.org/10.1126/science.1148326
  2. X. Feng, L. Jang, 2006, Design and Creation of Superwetting/Antiwetting Surfaces, Adv. Mater., Vol. 18, pp. 3063-3078. https://doi.org/10.1002/adma.200501961
  3. T. Hart, A. Watson, 2007, Electroforming, Metal Finishing, Vol. 105, pp. 331-341. https://doi.org/10.1016/S0026-0576(07)80351-5
  4. W. Menz, J. Mohr, O. Paul, 2004, Microsystem Technology, Germany : WILEY-VCH.
  5. D. N. Lee, J. H. Lee, I. K. Kang, 1973, The Structure of Porous Anodic Oxide Films on Aluminum, Korea Institute of Science and Technology, pp. 348-354.
  6. T. H. Kim, Y. E. Yoo, Y. H. Seo, H. J. Lee and Y. W. Park, A study on high aspect ratio of plastic nano hire molding, Journal of Korean Society of Precision Engineering Spring Annual Meeting, pp.471-472, 2006.
  7. A. YIN, M. Tzolov, D. Cardimona, L. Guo, J. Xu, 2007, Fabrication of highly ordered anodic aluminum oxide template on silicon substrates, IET Circuits Devices Syst., Vol. 1, pp. 205-209. https://doi.org/10.1049/iet-cds:20060101
  8. S. H. Hong, J. H. Lee, H. Lee, 2007, Fabrication of 50nm patterned nickel stamp with hot embossing and electroforming process, Microelectronic Eng., Vol. 84, pp. 977-979 https://doi.org/10.1016/j.mee.2007.01.101
  9. H. S. Lee, D. S. Kim, T. H. Kwon, 2007, UV nano embossing for polymer nano structures with nontranspatent mold insert, Microsyst. Tech., Vol. 13, pp. 593-599. https://doi.org/10.1007/s00542-006-0172-5