References
- Chang, M.B. and J.-S. Chang (2006) Abatement of PFCs from semiconductor manufacturing process by nonthermal plasma technologies, A critical review, Ind. Eng. Chem. Res., 45, 4101-4109. https://doi.org/10.1021/ie051227b
- Fridman, A., S. Nester, L.A. Kennedy, A. Saveliev, and O. Mutaf-Yardimci (1999) Gliding arc gas discharge, Progress in Energy and Combustion Science, 25, 211-231. https://doi.org/10.1016/S0360-1285(98)00021-5
- Glocker, B., G. Nentwig, and E. Messerschmid (2000) 1-40 kW steam respectively multi gas thermal plasma torch system, Vacuum, 59, 35-46. https://doi.org/10.1016/S0042-207X(00)00252-9
- International SEMATECH Technology Transfer (1998) Current status of technology: Perfluorocompound (PFC) Emissions reduction, #98053508A-TR.
- International SEMATECH Technology Transfer (1999) Long- Term Evaluation of the Litmas "Blue" Plasma Device for Point-of-Use (POU) Perfluorocompound and Hydro fluorocarbon Abatement, #99123865BENG.
- Kim, D. and D.W. Park (2008) Decomposition of PFCs by steam plasma at atmospheric pressure, Surf. & Coat. Tech. 202, 5280-5283. https://doi.org/10.1016/j.surfcoat.2008.06.023
- Kim, K.-T., Y.-H. Kim, M.S. Cha, Y.-H. Song, S.-J. Kim, and J.-I. Ryu (2004) Decomposition characteristics of PFCs for various discharge methods in dielectric barrier discharge, Korean J. of Atmos. Environ., 20(5), 625-632. (in Korean with English abstract)
-
Kim, K.-T., Y.-H. Song, M.S. Cha, D.H. Lee, and D.-H. Kim (2008) Characteristics of rotating arc for
$CF_{4}$ removal, Int. J. Environment and Waste Management, 2, 412-422. https://doi.org/10.1504/IJEWM.2008.021782 - Nishikawa, H., M. Ibe, M. Tanaka, M. Ushio, T. Takemoto, K. Tanaka, N. Tanahashi, and T. Ito (2004) A treatment of carnonaceous wastes using thermal plasma with steam, Vacuum, 73, 589-593. https://doi.org/10.1016/j.vacuum.2003.12.074
- Park, D.-W. and H.-S. Seon (2009) Thermal plasma process for decomposing PFCs, J. of Environmental & Thermal Eng., 6(1), 89-98. (in Korean with English abstract)
- Watanabe, T. and T. Tsuru (2008) Water plasma generation under atmosphere pressure for HFC destruction, Thin Solid Films, 516, 4391-4396. https://doi.org/10.1016/j.tsf.2007.10.062
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