Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
권호 표지

AE Signal Analysis of Yttria($Y_2O_3$) Ceramic Lapping Process

이트리아($Y_2O_3$) 세라믹 래핑가공의 AE 신호 분석

  • 차지완 (인하대학교 기계공학과 대학원) ;
  • 황성철 (인하대학교 기계공학과 대학원) ;
  • 신태희 (인하대학교 기계공학과 대학원) ;
  • 이은상 (인하대학교 기계공학과)
  • Published : 2010.02.15
Download PDF
⟨ Previous Next ⟩

Abstract

AE(acoustic emission) sensor has been used for a state monitoring and observation during a ultra-precision machining because AE signal, which has high frequency range, is sensitive enough. In case of ceramic fabrication, a monitoring of machining state is important because of its hard and brittle nature. A machining characteristic of ceramic is susceptibly different in accordance with variable machining conditions. In this study, Yttria($Y_2O_3$) ceramic was fabricated using the ultra-precision lapping process with in-process electrolytic dressing(IED) method. And the surface machining characteristic and AE sensor signal were compared and analyzed.

Keywords

References

  1. Stephenson, D. J., Sun, X., and Zervos, C., 2006, "A study on ELID ultra precision grinding of optical glass with acoustic emission," International Journal of Machine Tools and Manufacture, Vol. 46, No. 10, pp. 1053-1063. https://doi.org/10.1016/j.ijmachtools.2005.08.013
  2. Chang, Y. P., Hashimura, M., and Dornfeld, D. A., 1996, "An investigation of the AE signals in the lapping process," Annals of the CIRP, Vol. 45, No. 1, pp. 331-334. https://doi.org/10.1016/S0007-8506(07)63074-1
  3. Noboru, I., 1987, Introduction to Fine Ceramics: Applications in Engineering, John Wiley & Sons, New York, pp. 43-70.
  4. Oh, S. Y. and Kang, S. K., 2000, "Characteristics of $Y_2O_3$ buffer layer in MFIS structure," Inst. of Ind. Tech. Journal, Vol. 20, pp. 205-212.
  5. Katahira, K., Ohmori, H., Uehara, Y., and Azuma, M., 2005, "ELID grinding characteristics and surface modifying effects of aluminum nitride(AIN) ceramics," International Journal of Machine Tools and Manufacture, Vol. 45, No. 7-8, pp. 891-896. https://doi.org/10.1016/j.ijmachtools.2004.10.017
  6. Lee, E. S., Won, J. K., Chun, Y. J., Cho, M. W., Cho, W. S., and Lee, J. H., 2007, "Ultra-precision lapping of machinable ceramic $Si_3N_4$ by in-process electrolytic dressing," International Journal of Advanced Manufacturing Technology, Vol. 31, No. 11-12, pp. 1101-1108. https://doi.org/10.1007/s00170-005-0293-5
  7. Hwang, S. C., Kim, B. K., Won, J. K., and Lee, E. S., 2008, "A study on the optimal machining of the IED ultra-precision lapping by Taguchi method," Transactions of the Korean Society of Machine Tool Engineers, Vol. 17, No. 4, pp. 29-34.
  8. Hwang, S. C., Lee, J. T., Lee, E. S., Cho, M. W., and Cho, W. S., 2008, "Analysis of surface characteristics in the $Si_3N_4$/h-BN ceramic by IED ultra-precision lapping," Journal of the Korean Society for Precision Engineering, Vol. 25, No. 7, pp. 47-54.
  9. Kramer, N., 2007, "In-process identification of material-properties by acoustic emission signals," Annals of the CIRP, Vol. 56, No. 1, pp. 331-334. https://doi.org/10.1016/j.cirp.2007.05.076