Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Ultra Miniature Eddy Current Sensor with 3 Axes for On-Machine-Measurement

기상측정용 3축 구조의 초소형 와전류 센서 개발 및 평가

  • Kim, Sun-Ho (Department of Mechatronics Engineering, Dong-Eui Univ.)
  • 김선호 (동의대학교 메카트로닉스공학과)
  • Published : 2010.03.01
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Abstract

The OMM(On-Machine-Measurement) system has many advantages compare to conventional measurement in the way the time and cost. But, the sensor suitable to OMM system is restrictive use. Touch trigger probe sensor has long time for measurement and non-contact sensor has directional demerit. Because the long mechanical parts such as gear and lead screw for pump, injector and machine tools has big and heavy, unclamp and transferring for measurement in machining process is very difficult. This paper presents a development of ultra miniature eddy current displacement sensor with 3 axes for On-Machine-Measurement system. The accuracy of the sensor is experimentally proved in the grinding machine. In experimental results, the accuracy has under ${\pm}5\;{\mu}m$.

Keywords

References

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