Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Effects of Evaporation Processes and a Reduction Annealing on Thermoelectric Properties of the Sb-Te Thin Films

증착공정 및 환원분위기 열처리가 Sb-Te 박막의 열전특성에 미치는 영향

  • Bae, Jae-Man (Department of Materials Science and Engineering, Hongik University) ;
  • Kim, Min-Young (Department of Materials Science and Engineering, Hongik University) ;
  • Oh, Tae-Sung (Department of Materials Science and Engineering, Hongik University)
  • 배재만 (홍익대학교 공과대학 신소재공학과) ;
  • 김민영 (홍익대학교 공과대학 신소재공학과) ;
  • 오태성 (홍익대학교 공과대학 신소재공학과)
  • Received : 2010.12.02
  • Accepted : 2010.12.19
  • Published : 2010.12.30
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Abstract

Effects of evaporation processes and a reduction annealing on thermoelectric properties of the Sb-Te thin films prepared by thermal evaporation have been investigated. The thin film evaporated by using the powders formed by crushing a $Sb_2Te_3$ ingot as an evaporation source exhibited a power factor of $2.71{\times}10^{-4}W/m-K^2$. The thin film processed by evaporation of the mixed powders of Sb and Te as an evaporation source showed a power factor of $0.12{\times}10^{-4}W/m-K^2$. The thin film fabricated by coevaporation of Sb and Te dual evaporation sources possessed a power factor of $0.73{\times}10^{-4}W/m-K^2$. With a reduction annealing at $300^{\circ}C$ for 2 hrs, the power factors of the films evaporated by using the $Sb_2Te_3$ ingot-crushed powders and coevaporated with Sb and Te dual evaporation sources were remarkably improved to $24.1{\times}10^{-4}W/m-K^2$ and $40.2{\times}10^{-4}W/m-K^2$, respectively.

증착공정 및 환원분위기 열처리가 p형 Sb-Te 박막의 열전특성에 미치는 영향을 연구하였다. $Sb_2Te_3$ 잉곳을 분쇄한 분말을 증착원으로 사용하여 형성한 박막은 $2.71{\times}10^{-4}W/m-K^2$, Sb와 Te 혼합분말을 증착원으로 사용하여 형성한 박막은 $0.12{\times}10^{-4}W/m-K^2$, Sb와 Te의 동시 증착으로 제조한 박막은 $0.73{\times}10^{-4}W/m-K^2$의 출력인자를 나타내었다. $300^{\circ}C$에서 2시간 유지하는 환원분위기 열처리에 의해 $Sb_2Te_3$ 잉곳을 분쇄한 분말을 증착원으로 사용하여 형성한 박막의 출력인자가 $24.1{\times}10^{-4}W/m-K^2$로 향상되었으며, Sb와 Te의 동시증착으로 제조한 박막의 출력인자는 $40.2{\times}10^{-4}W/m-K^2$로 크게 향상되었다.

Keywords

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