Journal of the Korean Institute of Illuminating and Electrical Installation Engineers (조명전기설비학회논문지)

The Korean Institute of IIIuminating and Electrical Installation Engineers (한국조명전기설비학회)
권호 표지
DOI QR코드

DOI QR Code

Study on Surface Characteristics of Fe Doped MgO Protective Layer

Fe가 첨가된 MgO 보호막의 표면특성 개선에 관한 연구

  • Received : 2010.01.08
  • Accepted : 2010.01.26
  • Published : 2010.02.28
Download PDF
⟨ Previous Next ⟩

Abstract

In order to compete with other flat display devices such as Liquid Crystal Displays (LCDs) and organic light emitting diodes (OLEDs), Plasma Display Panels (PDPs) require to have high performances like high image quality, low power consumption and high speed driving. In this paper, Fe doped MgO protective layer was introduced for higher performance. Both the surface characteristics of the deposited thin films and the electro-optical properties of 4 inch test panels were investigated. It has been demonstrated experimentally that ac PDP with Fe doped MgO protective layer has lower discharge voltage than that of undoped MgO film, which corresponds to measured secondary electron emission coefficients. The crystallinity and surface roughness of thin films were determined by XRD patterns and AFM images. In addition, ac PDP with Fe doped MgO protective layer has improved address discharge time lag for high speed driving.

플라즈마 디스플레이 패널(Plasma Hsplay Panel :PDP)이 다른 평판 디스플레이 분야(Liquid Crystal Displays(LCDs) and organic light emitting diodes(OLEDs)등)와 경쟁에서 이기기 위해서는 제품의 고화질화, 저소비전력와 고속구동 등의 성능향상이 필요하다. 본 논문에서는 PDP의 성능향상을 위하여 유전체 보호층으로 쓰이는 MgO 박막에 Fe를 미량 첨가한 박막을 증착하고, 그 특성에 대하여 연구하였다. e-beam 증착법으로 증착된 Fe 도핑 된 MgO 박막의 표면특성과 전기광학적 특성을 4인치 테스트 패널을 제작하여 연구하였다. Fe가 도핑된 MgO 박막을 가지는 PDP는 Fe가 도핑되지 않은 PDP에 비해 낮은 방전전압 특성을 나타내었으며, 이는 박막에서 측정된 2차전자방출계수의 실험결과와 잘 일치되었다. 증착된 박막의 결정성과 표면 거칠기는 XRD 와 AFM 측정방법을 통하여 결정되었다. 또한, Fe가 도핑된 PDP는 고속구동을 위한 향상된 어드레스 방전 늦음의 특성을 나타내었다.

Keywords

References

  1. J.P. Boeuf, "Plasma display panels: physics, recent developments and key issues" J. Phys. D, 36, R53, (2003).
  2. D.-K. Lee, C.-H. Park, H. J. Lee, W.-S. Choi, D.-H. Kim, H.-J. Lee, "Electro-optical characteristics of plasma display panel with Mg1−xSixO protecting thin films deposited by an electron-beam evaporation method", Appl. Phys. Lett., 89, 191501, (2006). https://doi.org/10.1063/1.2372743
  3. D.-K. Lee, C.-H. Park, H. J. Lee, J.-Y. Choi, D.-H. Kim, H.-J. Lee, "The effect of a Si-doped protective layer on the discharge characteristics of an alternating current plasma display panel", Phys. Plasmas, 14, 103505, (2007). https://doi.org/10.1063/1.2796104
  4. R. Kim, Y. Kim, Y.U. Lee, H.J. Kim, J.W. Park, "Effect of ZrO2 addition on the structural, optical and electrical properties of MgO protective films", Surf. Coat. Technol. 161, 52, (2002). https://doi.org/10.1016/S0257-8972(02)00324-9
  5. B. Guo, C. Liu, X. Z. Song, L. Liu, Y. Fan, X. Xia, D. Fan, "Influence of ZrO2 addition on the microstructure and discharge properties of Mg–Zr–O protective layers in alternating current plasma display panels", J. Appl. Phys. 98, 043304, (2005). https://doi.org/10.1063/1.2009077
  6. J. H. Eun, J. H. Lee, S. G. Kim, M. Y. Um, S. Y. Park, H. J. Kim, "The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method", Thin Solid Films, 435, 199, (2003). https://doi.org/10.1016/S0040-6090(03)00362-6
  7. E.Y. Jung, S.G. Lee, S.H. Sohn, D.K. Lee, H.K. Kim, "Electrical properties of plasma display panel with Mg1– xZnxO protecting thin films deposited by a radio frequency magnetron sputtering method", Appl. Phys. Lett. 86, 153503, (2005). https://doi.org/10.1063/1.1899238
  8. J.H. Cho, R.H. Kim, K.W. Lee, C.Y. Son, G.Y. Yeom, H.J. Kim, J.Y. Kim, J.W. Park, "Low-voltage characteristics of MgO-CaO films as a protective layer for AC plasma display panels by e-beam evaporation", J. Mater. Sci. 34, 5055, (1999). https://doi.org/10.1023/A:1004748714098
  9. E.H. Choi, H.J. Oh, Y.G. Kim, J.J. Ko, J.Y. Lim, J.G. Kim, D.I. Kim, G. Cho, S.O. Kang, "Measurement of Secondary Electron Emission Coefficient $({\gamma})$ of MgO Protective Layer with Various Crystallinities", Jpn. J. Appl. Phys. 37, 7015, (1998). https://doi.org/10.1143/JJAP.37.7015
  10. N. Yasui, H. Nomura, A. Ide-Ektessabi, "Characteristics of ion beam modified magnesium oxide films", Thin Solid Films, 447-448, 377, (2004). https://doi.org/10.1016/S0040-6090(03)01087-3
  11. E. H. Choi, "Discharge and $\gamma$-characteristics of Ion induced MgO protective layer in PDP", Information Display, Vol.5, No.6, p.23-35, (2004).
  12. J.-H. Ryu, "A study on the Improvement of the High Temperature Misfiring in AC PDP", thesis for a doctor's degree, Pusan National University, August, (2005).
  13. Y.W. Choi, J.H. Kim, "Sputtering technique of magnetism oxide thin film for plasma display panel applications", KIEE J. Electr. Eng. Technol. 1, 110, (2006). https://doi.org/10.5370/JEET.2006.1.1.110
  14. H.S. Uhm, E.H. Choi, G.S. Cho, "Influence of secondary electron emission on breakdown voltage in a plasma display panel", Appl. Phys. Lett. 78, 592, (2001). https://doi.org/10.1063/1.1343492
  15. 박정후, 유수복, 이돈규, "AC PDP의 전기 광학적 특성과 동작가스 Xe+Ne+Kr의 구성비와의 상관관계에 관한 연구", 조명·전기설비학회논문지, 제 21권 2호, 2007.02. https://doi.org/10.5207/JIEIE.2007.21.2.009
  16. 이돈규, 박정후, "PDP의 동작가스기술 및 최근 연구동 향", 조명·전기설비학회지 특집기사, 제22권 6호, pp. 46-52, 2008.12. https://doi.org/10.5207/JIEIE.2008.22.4.046