Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Effects of metal catalysts on the characteristics of NO sensor using ZnO thin film as sensing material

금속 촉매가 ZnO 박막을 감지물질로 이용한 NO 센서의 특성에 미치는 영향

  • 정귀상 (울산대학교 전기전자정보시스템공학부) ;
  • 정재민 (울산대학교 전기전자정보시스템공학부)
  • Published : 2010.01.30
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Abstract

This paper describes the fabrication and characteristics of NO sensor using ZnO thin film by RF magnetron sputter system. The sensitivity, working temperature, and response time of sputtered pure ZnO thin film and added catalysts such as Pt, Pd, Al, Ti on those films were measured and analyzed. The sensitivity of pure ZnO thin film at working temperature of $300^{\circ}C$ is 0.875 in NO gas concentration of 0.046 ppm. At same volume of the gas in chamber, measuring sensitivity of 1.87 at $250^{\circ}C$ was the case of Pt/ZnO thin film. The ZnO thin films added with catalyst materials were showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film.

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References

  1. M. Ali, Ch. Y. Wang, C. C. Rohlig, V. Cimalla, Th. Stauden, and O. Ambacher, “NOx sensing properties properties of $In_2O_3$ thin films grown by MOCVD”, Sen. Actu. B, vol, 129, pp. 467-472, 2008. https://doi.org/10.1016/j.snb.2007.08.011
  2. G. Korotcenkov, “Gas response control through structual and chemical modification of metal oxide films: state of the art and approacb”, Sen. Actu. B, vol, 107, pp. 209-232, 2005. https://doi.org/10.1016/j.snb.2004.10.006
  3. S. C. Navale, V. Ravi, I. S. Mulla, S. W. Gosavi, and S. K. Kulkarni, “Low temperature synthesis and NOx sensing properties of nanostructured Al-doped ZnO”, Sen. Actu. B, vol, 126, pp. 382-386, 2007. https://doi.org/10.1016/j.snb.2007.03.019
  4. D. D. Lee, “Chemical sensors technology”, J. Kor. Sensors Soc., vol. 18, no. 1, pp. 1-21, 2009. https://doi.org/10.5369/JSST.2009.18.1.001
  5. M. Stankova, X. Vilanova, J. Calderer, E. Llobet, J. Brezmes, I. Gracia, C. Cane, and X. Correig, “Sensitivity and selectivity improvement of rf sputtered $WO_3$ microhotplate gas sensors”, Sen. Actu. B, vol.113, pp. 241-248, 2005.
  6. P. K. basu, P. Bhattacharyya, N. Saha, H. Saha, and S. Basu, “The superior performance of the electrochemically grown ZnO thin films as methane sensor”, Sen. Actu. B, vol. 133, pp. 357-363, 2008. https://doi.org/10.1016/j.snb.2008.02.035
  7. K. S. Yoo, “NOx sensing charateristics of the $WO_3$- based thin-film gas sensors”, J. Kor. Sensors Soc., vol. 5, no. 5, pp. 39-46, 1996.
  8. S. C. Navale, V. Ravi, I. S. Mulla, S. W. Gosavi, and S. K. Kulkarni, “Low temperature synthesis and NOx sensing properties of nanostructured Al-doped ZnO”, Sen. Actu. B, vol. 126, pp. 382-386, 2007. https://doi.org/10.1016/j.snb.2007.03.019