Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

An ITO/Au/ITO Thin Film Gas Sensor for Methanol Detection at Room Temperature

  • Jeong, Cheol-Woo (School of Materials Science and Engineering, University of Ulsan) ;
  • Shin, Chang-Ho (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Dae-Il (School of Materials Science and Engineering, University of Ulsan) ;
  • Chae, Joo-Hyun (Technical Institute, New Optics Ltd.) ;
  • Kim, Yu-Sung (Technical Institute, New Optics Ltd.)
  • Published : 2010.04.25
Download PDF
⟨ Previous Next ⟩

Abstract

Indium tin oxide (ITO) films with a 5 nm thick Au interlayer were prepared on glass substrates. The effects of the Au interlayer on the gas sensitivity for detecting methanol vapors were investigated at room temperature. The conductivity of the film sensor increased upon exposure to methanol vapor and the sensitivity also increased proportionally with the methanol vapor concentration. In terms of the sensitivity measurements, the ITO film sensor with an Au interlayer shows a higher sensitivity than that of the conventional ITO film sensor. This approach is promising in gaining improvement in the performance of ITO gas sensors used for the detection of methanol vapor at room temperature.

Keywords

References

  1. H. Gong, J. Q. Hu, J. H. Wang, C. H. Ong, and F. R. Zhu, Sens. Actuators, B 115, 247 (2006) [DOI: 10.1016/j.snb.2005.09.008].
  2. A. Salehi, Sens. Actuators, B 96, 88 (2003) [DOI: 10.1016/s0925-4005(03)00490-8].
  3. P. Bogdanov, M. Ivanovskaya, E. Comini, G. Faglia, and G. Sberveglieri, Sens. Actuators, B 57, 153 (1999) [DOI: 10.1016/s0925-4005(99)00157-4].
  4. B. P. J. de Lacy Costello, R. J. Ewen, N. M. Ratcliffe, and M. Richards, Sens. Actuators, B 134, 945 (2008) [DOI: 10.1016/j.snb.2008.06.055].
  5. N. G. Patel, P. D. Patel, and V. S. Vaishnav, Sens. Actuators, B 96, 180 (2003) [DOI: 10.1016/s0925-4005(03)00524-0].
  6. D. K. Lee, S. Kim, M. C. Kim, S. H. Eom, H. T. Oh, and S. H. Choi, J. Korean Phys. Soc. 51, 1378 (2007). https://doi.org/10.3938/jkps.51.1378
  7. S. M. Kim, H. W. Choi, K. H. Kim, S. J. Park, and H. H. Yoon, J. Korean Phys. Soc. 55, 1996 (2009) [DOI: 10.3938/jkps.55.1996].
  8. Y. S. Kim, J. H. Park, and D. Kim, Vacuum 82, 574 (2008) [DOI:10.1016/j.vacuum.2007.08.011].

Cited by

  1. Investigation on optical and electrical properties of ZnO sandwich structure with metal interlayer vol.53, pp.5S1, 2014, https://doi.org/10.7567/JJAP.53.05FF05
  2. Study on the synthesis of Indium Tinoxide (ITO) nanomaterial using sol gel process and its potential for CO gas detection vol.776, 2016, https://doi.org/10.1088/1742-6596/776/1/012060
  3. Development of ITO thin film sensor for detection of benzene vol.206, 2015, https://doi.org/10.1016/j.snb.2014.07.037
  4. Hybrid solgel Bragg grating loaded waveguide by soft-lithography and its potential use as optical sensor vol.60, pp.3, 2011, https://doi.org/10.1007/s10971-011-2501-0
  5. Comparing different ITO-metal thin film structures for ethanol and carbon dioxide sensing application vol.38, pp.1, 2018, https://doi.org/10.1108/SR-04-2017-0064
  6. Synthesis, characterization, electrical and sensor behavior of PANI/In2O3nano composites vol.502, pp.1, 2016, https://doi.org/10.1080/00150193.2016.1235884