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전기의세계
Volume 59 Issue 2
/
Pages.18-23
/
2010
/
1598-4613(pISSN)
The Korean Institute of Electrical Engineers (대한전기학회)
탄화규소 (4H-SiC) 고전압 MOSFET의 소자의 질화처리된 게이트 산화막 형성 기술 연구동향
Mun, Jeong-Hyeon
문정현
(서울대학교)
Published : 2010.02.01
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