참고문헌
- Lee, K. R. and Eun, K. Y., "Diamond- like Carbon Film," Bull of the Korean Inst. of Mat. & Mater., Vol. 6, No. 4, pp. 345-361, 1993.
- Cui, F. Z. and Li, D. J., "A review of investigations on biocompatibility of diamondlike carbon and carbon nitride films," Surf. Coat. Technol., Vol. 131, No. 1-3, pp. 481-487, 2000. https://doi.org/10.1016/S0257-8972(00)00809-4
- Baldwin, D. A. and Fallabella, S., "Deposition processes utilizing a new filtered cathodic arc source," Proc. of the 38th Annual Techn. Conf., Society of Vacuum Coaters, pp. 309-316, 1995.
- Anders, A., Anders, S. and Brown, I. G, "Effect of duct bias on transport of vacuum arc plasmas through curved magnetic filters," J. Appl. Phys., Vol. 75, No. 10, pp. 4900-4905, 1994. https://doi.org/10.1063/1.355777
- Aksenov, I. I., Belous, V. A., Padalka, V. G. and Khoroshikh, V. M., "Transport of plasma streams in a curvilinear plasma-optics system," Sov. J. Plasma Phys., Vol. 4, No. 4, pp. 425-428, 1978.
- Anders, S., Diaz, J., Ager, J. W. III, Lo, R. Y. and Bogy, D. B., "Thermal stability of amorphous hard carbon films produced by cathodic arc deposition," Appl. Phys. Lett., Vol. 71, No. 23, pp. 3367-3369, 1997. https://doi.org/10.1063/1.120339
- Anders, S., Ager, J. W. III, Pharr, G. M., Tsui, T. Y. and Brown, I. G, "Heat treatment of cathodic arc deposited amorphous hard carbon films," Thin Solid Films, Vol. 308-309, pp. 186-190, 1997. https://doi.org/10.1016/S0040-6090(97)00385-4
- Yoshikawa, M., Katagiri, G., Ishida, H. and Akamatsu, T., "Raman spectra of diamondlike amorphous carbon films," J. Appl. Phys, Vol. 64, No. 11, pp. 6464-6468, 1988. https://doi.org/10.1063/1.342063
- Savvides, N. and Bell, T. J., "Microhardness and Young's modulus of diamond and diamondlike carbon films," J. Appl. Phys. Vol. 72, No. 7, pp. 2791, 1992. https://doi.org/10.1063/1.351530
- Lee, C., Shin, J., Kim, J., Lee, K. and Yoon, K., "The control of the structure and properties of tetrahedral amorphous carbon films prepared by Filters Vacuum Arc," Journal of the Korean Vacuum Society, Vol. 11, No. 1, pp. 8-15, 2002.
- McKenzie, D. R., Yin, Y., Marks, N. A., Davis, C. A., Kravtchinskaia, E., Pailthorpe, B. A. and Amaratunga, G. A. J., "Tetrahedral amorphous carbon properties and applications," J. Non-cryst. Solids, Vol. 164-166, Part 2, pp. 1101-1106, 1993. https://doi.org/10.1016/0022-3093(93)91191-5
- Neuville, S. and Matthews, A., "Hard Carbon Coatings: The Way Forward," Materials Research Society Bulletin, pp. 22-26, 1997.
- Park, S. S. and Won, J. H., "Research on ultra-precision Grinding Work of silicon carbide," Journal of Korean Society for Precision Engineering, Vol. 26, No. 9, pp. 58-63, 2009.