정보저장시스템학회논문집 (Transactions of the Society of Information Storage Systems)

  • 제6권2호
  • /
  • Pages.79-82
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  • 2010
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  • 1738-6845(pISSN)
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  • 2288-2022(eISSN)
정보저장시스템학회 (The Society of Information Storage Systems)
권호 표지

광학 필터를 사용한 고해상 고체침지 렌즈 기반 근접장 현미경 적용 가능성에 대한 연구

Feasibility study on realization of high resolution solid immersion lensbased near-field microscopy by use of an annular aperture

  • 문형배 (연세대학교 정보저장기기연구센터) ;
  • 윤용중 (연세대학교 정보저장기기연구센터) ;
  • 김태섭 (연세대학교 기계공학부) ;
  • 박영필 (연세대학교 기계공학부) ;
  • 박노철 (연세대학교 기계공학부) ;
  • 박경수 (연세대학교 기계공학부)
  • 투고 : 2010.09.13
  • 심사 : 2010.09.24
  • 발행 : 2010.09.25
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초록

In optical imaging systems, such as microscopes, high resolution exposure systems, and optical storage devices, higher optical resolution is a requirement. One of the promising technologies that is able to satisfy this requirement with relatively simple construction and reliable performance are, solid immersion lens (SIL)-based near-field (NF) optical systems. High NA optical systems using annular apertures have been investigated as one solution to achieve higher resolutions and an extended focal depth. By applying an optimized annular aperture to convention SIL optical head resolution can be increased by approximately 20%. This novel SIL-based near-field optics will be verified through experiments such as measuring focused beam spot profiles and observing the topology of a measurement sample. The studied SIL-based near-field optics can be applicable to not only next generation optical storage device but also high resolution microscopy and pattering technologies.

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참고문헌

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