Transactions of the Society of Information Storage Systems (정보저장시스템학회논문집)

The Society of Information Storage Systems (정보저장시스템학회)
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Feasibility study on realization of high resolution solid immersion lensbased near-field microscopy by use of an annular aperture

광학 필터를 사용한 고해상 고체침지 렌즈 기반 근접장 현미경 적용 가능성에 대한 연구

  • 문형배 (연세대학교 정보저장기기연구센터) ;
  • 윤용중 (연세대학교 정보저장기기연구센터) ;
  • 김태섭 (연세대학교 기계공학부) ;
  • 박영필 (연세대학교 기계공학부) ;
  • 박노철 (연세대학교 기계공학부) ;
  • 박경수 (연세대학교 기계공학부)
  • Received : 2010.09.13
  • Accepted : 2010.09.24
  • Published : 2010.09.25
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Abstract

In optical imaging systems, such as microscopes, high resolution exposure systems, and optical storage devices, higher optical resolution is a requirement. One of the promising technologies that is able to satisfy this requirement with relatively simple construction and reliable performance are, solid immersion lens (SIL)-based near-field (NF) optical systems. High NA optical systems using annular apertures have been investigated as one solution to achieve higher resolutions and an extended focal depth. By applying an optimized annular aperture to convention SIL optical head resolution can be increased by approximately 20%. This novel SIL-based near-field optics will be verified through experiments such as measuring focused beam spot profiles and observing the topology of a measurement sample. The studied SIL-based near-field optics can be applicable to not only next generation optical storage device but also high resolution microscopy and pattering technologies.

Keywords

References

  1. I. Ichimura, S. Hayashi, and G. S. Kino, "Highdensity optical recording using a solid immersion lens," Appl. Opt. 36(19), 4339-4348 (1997). https://doi.org/10.1364/AO.36.004339
  2. M. Shinoda, K. Saito, T. Kondo, M. Furuki, M. Takeda, A. Nakaoki, M. Sasaura, and K. Fujiura, "High-Density Near-Field Readout Using Solid Immersion Lens Made of KTaO3 Monocrystal," Jpn. J. Appl. Phys. 45(No. 2B), 1332-1335 (2006). https://doi.org/10.1143/JJAP.45.1332
  3. C. A. Verschuren, D. M. Bruls, B. Yin, J. M. A. van den Eerenbeemd, and F. Zijp, "High-Density Near-Field Recording on Cover-Layer Protected Discs Using an Actuated 1.45 Numerical Aperture Solid Immersion Lens in a Robust and Practical System," Jpn. J. Appl. Phys. 46(No. 6B), 3889-3893 (2007). https://doi.org/10.1143/JJAP.46.3889
  4. Y. J. Yoon, W. C. Kim, H. Choi, N. C. Park, and Y. P. Park, " Effect of annular aperture on solid immersion lens-based near-field recording, " Jpn. J. Appl. Phys. 47, 6804 - 6808 (2008). https://doi.org/10.1143/JJAP.47.6804
  5. T. Chen, T. Milster, S.K. Park, B. McCarthy, and D. Sarid, " Near-field solid immersion lens microscope with advanced compact mechanical design, " Optical engineering 45, 103002 - 1-103002 - 6 (2006). https://doi.org/10.1117/1.2361276