Abstract
By generating 2-directional vibration in a xy plane of workpiece table, a newly developed micro drilling using 2-directional vibration was carried out. The vibration was produced by applying sinusoidal voltages to the orthogonally arranged piezoelectric materials built in the workpiece excitation table. Through the micro-drilling experiments using poly-carbonate and brass material, it was found that micro drilling using 2-directional vibration in a workpiece table could be an efficient method to enhance the form accuracy of machined workpiece by suppressing burr formation at both entry and exit region. A higher form accuracy could be obtained by increasing stiffness of feeding mechanism, decrease of geometric tolerance of combining jig, and development of high performance excitation table which generates amplified vibration at higher frequency.