Journal of electromagnetic engineering and science

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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Wide-Band Measurements of Antenna-Coupled Microbolometers for THz Imaging

  • Tamminen, Aleksi (Department of Radio Science and Engineering, MilliLab, SMARAD, Aalto University School of Science and Technology) ;
  • Ala-Laurinaho, Juha (Department of Radio Science and Engineering, MilliLab, SMARAD, Aalto University School of Science and Technology) ;
  • Mallat, Juha (Department of Radio Science and Engineering, MilliLab, SMARAD, Aalto University School of Science and Technology) ;
  • Luukanen, Arttu (MilliLab, VTT Technical Research Centre of Finland) ;
  • Grossman, Erich N. (Optoelectronics Division, National Institute of Standards and Technology) ;
  • Raisanen, Antti V. (Department of Radio Science and Engineering, MilliLab, SMARAD, Aalto University School of Science and Technology)
  • Received : 2010.04.14
  • Published : 2010.09.30
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Abstract

We present results of room-temperature characterization of lithographically manufactured antenna-coupled NbN micro-bolometers. The bolometers are assembled together with a hyper-hemispherical Si lens to couple the incident radiation to the bolometer from the back-side of the substrate. The bolometers are designed to operate at 300~1,000 GHz and they are characterized at 321~782 GHz. Radiation patterns are measured at 321 GHz, 400 GHz, 654 GHz, and at 782 GHz. The frequency dependency of the beamwidth is studied with several azimuthal beam profile measurements at 321~500 GHz.

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References

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