참고문헌
- Nam, S. D., 2008, “Micro Nano Machining by Micro Factory,” KISTI
- Sim, Y. I., 2008, “High Effectiveness of Machining System,” KISTI
- Park, J. S., 2005, “Micro/Nano System Research Tendency,” KISTI
- Park, J. H., 2005, “The Next Generation Nano Shape Measurement System-AFM,” Journal of the KSEM, Vol. 45, No. 3, pp44-48
- Kim, G. B., 2009, “A Novel Depth-from-focusbased Measurement System for the Reconstruction of Surface Morphology with Depth Discontinuity,” International Journal of Advanced Manufacturing Technology, Vol. 40, pp. 1158-1165 https://doi.org/10.1007/s00170-008-1438-0
- Ghassan A. Al-Kindi and Bihan Shirnzadeh, 2009, “Feasibility Assessment of Vision-based Surface Roughness Parameters Acquisition for Different Types of Machined Specimens,” Image and Vision Computing, 27, pp. 444-458 https://doi.org/10.1016/j.imavis.2008.06.011
- Taeho, H., 2007, “A Study on Light Scattering Characteristics of CMP induced on Silicon Ocide Wafer Surface for Defects Detection and Classification,” Osaka university
- Beckmann, P. and Spizzichino, A., 1963, The scattering of electromagnetic waves from rough surface, Pergamon Press, Oxford
- Tian, G. Y., Lu, R. S. and Gledhill, D., 2007, “Surface Measurement Using Active Vision and Light Scattering,” Optics and Lasers in Engineering, Vol. 45, No. 1, pp.131-139 https://doi.org/10.1016/j.optlaseng.2006.03.005
- Bakolias, C., 1997, “Dark Field, Scheimpflug Imaging for Surface Inspection,” Journal of SPIE, Vol. 3029, pp. 57-68 https://doi.org/10.1117/12.271248
- Lisa C. Leonard and Vincent Toal, 1998, “Roughness Measurement of Metallic Surfaces Based on the Laser Speckle Contrast Method,” Optics and Lasers in Engineering, Vol. 30, No. 5, pp. 433-440 https://doi.org/10.1016/S0143-8166(98)00036-0
- Hamed, A. M., El-Ghandoor, H., El-Diasty, F., Saudy, M., 2003, “Analysis of Speckle Images to Assess Surface Roughness,” Optics and Lasers Technology, Vol. 36, pp. 249-253 https://doi.org/10.1016/j.optlastec.2003.09.005
- Roy, R. K., 2001, “Design of Experiments Using the Taguchi Approach,” John Wiley & Sons Inc
- Kim, G. B. and Han, J. C., 2007, “An Experimental Analysis on Dark-field Laser Scattering for the Surface Inspection of Infrared Cut-off Filters,” KSPE, Vol. 24, No. 11, pp. 76-83
피인용 문헌
- A Preliminary Study on the Optimal Shape Design of the Axisymmetric Forging Component Using Equivalent Static Loads vol.35, pp.1, 2011, https://doi.org/10.3795/KSME-A.2011.35.1.001
- Study on Experimental Modeling and Estimation of Roughness of Nanoscale Lapping Surface Based on Laser Scattering Patterns vol.35, pp.1, 2011, https://doi.org/10.3795/KSME-A.2011.35.1.107