ETRI Journal

  • 제31권4호
  • /
  • Pages.478-480
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  • 2009
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  • 1225-6463(pISSN)
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  • 2233-7326(eISSN)
한국전자통신연구원 (Electronics and Telecommunications Research Institute)
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Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

  • Uranga, Arantxa (Department of Electrical Engineering, Universitat Autonoma de Barcelona) ;
  • Verd, Jaume (Electronic Systems Group, Universitat de les Illes Balears) ;
  • Lopez, Joan Lluis (Department of Electrical Engineering, Universitat Autonoma de Barcelona) ;
  • Teva, Jordi (Department of Electrical Engineering, Universitat Autonoma de Barcelona) ;
  • Torres, Francesc (Department of Electrical Engineering, Universitat Autonoma de Barcelona) ;
  • Giner, Joan Josep (Department of Electrical Engineering, Universitat Autonoma de Barcelona) ;
  • Murillo, Gonzalo (Department of Electrical Engineering, Universitat Autonoma de Barcelona) ;
  • Abadal, Gabriel (Department of Electrical Engineering, Universitat Autonoma de Barcelona) ;
  • Barniol, Nuria (Department of Electrical Engineering, Universitat Autonoma de Barcelona)
  • 투고 : 2008.11.25
  • 심사 : 2009.06.09
  • 발행 : 2009.08.30
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초록

The design of a CMOS clamped-clamped beam resonator along with a full custom integrated differential amplifier, monolithically fabricated with a commercial 0.35 ${\mu}m$ CMOS technology, is presented. The implemented amplifier, which minimizes the negative effect of the parasitic capacitance, enhances the electrical MEMS characterization, obtaining a $48{\times}10^8$ resonant frequency-quality factor product ($Q{\times}f_{res}$) in air conditions, which is quite competitive in comparison with existing CMOS-MEMS resonators.

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참고문헌

  1. J. Teva et al., "VHF CMOS-MEMS Resonator Monolithically Integrated in a Standard 0.35 $\mu$m CMOS Technology," Proc. MEMS, 2007, pp. 779-782.
  2. P. Rantakari et al., “Reducing the Effect of Parasitic Capacitance on MEMS Measurements,” Proc. Transducers/Eurosensors XV, June 2001, pp. 1156-1159.
  3. J.R. Clark et al., “High-Q UHF Micromechanical Radial Contour Mode Disk Resonators,” J. Microelectromech. Syst., vol. 14, no. 6, 2005, pp. 1298-1310. https://doi.org/10.1109/JMEMS.2005.856675
  4. A. Uranga et al., “Fully Integrated MIXLER Based on VHF CMOS-MEMS Clamped-Clamped Beam Resonator,” IEE Electron. Lett., vol. 43, 2007, pp. 452-454. https://doi.org/10.1049/el:20070580
  5. J.L. Lopez et al., “High Q CMOS-MEMS Resonators and Its Applications as RF Tunable Band-Pass Filters,” Proc. Transducers, June 2009, pp. 557-560.
  6. C.-C. Lo et al., “On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators,” Proc. Transducers, June 2007, pp. 2449-2452.

피인용 문헌

  1. Zero-level packaging of MEMS in standard CMOS technology vol.20, pp.6, 2010, https://doi.org/10.1088/0960-1317/20/6/064009
  2. Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification vol.38, pp.2, 2016, https://doi.org/10.4218/etrij.16.2515.0015
  3. Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration vol.19, pp.8, 2009, https://doi.org/10.3390/s19081895