Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication of micro heaters with uniform-temperature area on poly 3C-SiC membrane and its characteristics

다결정 3C-SiC 멤브레인 위에 균일한 온도분포를 갖는 마이크로 히터의 제작과 그 특성

  • 정귀상 (울산대학교 전기전자정보시스템공학부) ;
  • 정재민 (울산대학교 전기전자정보시스템공학부)
  • Published : 2009.09.30
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Abstract

This paper describes the fabrication and characteristics of micro heaters built on AlN($0.1{\mu}m$)/3C-SiC($1{\mu}m$) suspended membranes by surface micromachining technology. In this work, 3C-SiC and AlN films are used for high temperature environments. Pt thin film was used as micro heaters and temperature sensor materials. The resistance of temperature sensor and the power consumption of micro heaters were measured and calculated. The heater is designed for operating temperature up to about $800^{\circ}C$ and can be operated at about $500^{\circ}C$ with a power of 312 mW. The thermal coefficient of the resistance(TCR) of fabricated Pt resistance of temperature detector(RTD)'s is 3174.64 ppm/$^{\circ}C$. A thermal distribution measured by IR thermovision is uniform on the membrane surface.

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References

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