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LCD 대평판 고정밀 얼라인먼트를 위한 비전 시스템 연구

A Study on Vision System for High Precision Alignment of Large LCD Flat Panel Display

  • 조성만 (서울산업대학교 MSP 기술지원센터) ;
  • 송춘삼 (서울테크노파크) ;
  • 김준현 (서울테크노파크) ;
  • 김종형 (서울산업대학교 기계설계자동화학부)
  • 발행 : 2009.09.01

초록

This work is to develop a vision system for high precision alignment between upper and lower plates required at the imprinting process of the large LCD flat panel. We compose a gantry-stage that has highly repeated accuracy for high precision alignment and achieves analysis about thermal transformations of stage itself. Position error in the stage is corrected by feedback control from the analysis. This system can confirm alignment mark of upper and lower plates by using two cameras at a time for the alignment of two plates. Pattern matching that uses geometric feature is proposed to consider the recognition problem for alignment mark of two plates. It is algorithm to correct central point and angle for the alignment from the recognized mark of upper and lower plates based on the special characteristics. At the alignment process, revision for error position is performed through Look and Move techniques.

키워드

참고문헌

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