한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제22권9호
  • /
  • Pages.756-759
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  • 2009
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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펄스 레이져 증착법으로 성장한 ZnO 박막의 마이크로 PL 특성 분석

Investigation on the Micro-photoluminescence of ZnO Thin Films Grown by Pulsed Laser Deposition

  • 이득희 (한국과학기술연구원 에너지재료연구단) ;
  • 임재현 (한국과학기술연구원 에너지재료연구단) ;
  • 김상식 (고려대학교 전기전자전파공학부) ;
  • 이상렬 (한국과학기술연구원 에너지재료연구단)
  • 발행 : 2009.09.01
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초록

We described the growth of undoped ZnO thin films and their optical properties changing with a various growth temperature. The undoped ZnO thin films were grown on $c-Al_2O_3$ substrates using pulsed laser deposition (PLD) at room temperature, 200, 400, and $600^{\circ}C$, respectively. Field emission microscopy (FE-SEM) measurements showed that the grain size of undoped ZnO thin films are increasing as a increase of growth temperature. In addition, we were investigated that the structural and optical properties of undoped ZnO thin films by x-ray diffraction (XRD) and photoluminescence (PL) studied. Also, we could confirmed that the exciton luminescence was strongly related to charge trap by grain boundary of the samples using micro-PL measurement.

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참고문헌

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