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열가소성 폴리머 필름의 트라이볼로지 특성에 대한 온도의 영향

Effects of Temperature on the Tribological Characteristics of Thermoplastic Polymer Film

  • 김광설 (한국기계연구원 나노융합기계연구본부) ;
  • 허정철 (한국과학기술원 기계항공시스템학부) ;
  • 김경웅 (한국과학기술원 기계항공시스템학부)
  • Kim, Kwang-Seop (Nano-Mechanical Systems Research Division, Korea Institute of Machinery & Materials(KlMM)) ;
  • Heo, Jung-Chul (School of Mechanical, Aerospace & Systems Engineering, Korea Advanced Institute of Science and Technology(KAIST)) ;
  • Kim, Kyung-Woong (School of Mechanical, Aerospace & Systems Engineering, Korea Advanced Institute of Science and Technology(KAIST))
  • 발행 : 2009.08.31

초록

Friction tests were carried out in order to investigate the effects of temperature on the friction and wear behaviors between a PMMA film and a fused silica lens using a microtribometer. The friction forces on the PMMA film were measured under atmospheric condition as the temperature of the film was increased from 300 K to 443 K. The contact area between the film and the lens was observed. The tribological characteristics of the film were significantly changed as the temperature increased. The changes were discussed with the change of the film state from glassy to viscous flow. In addition, the results showed that the friction behavior can be varied with the thermal history of the PMMA film. Residual solvent in the PMMA film could emerge to the PMMA surface due to an additional heating and the solvent on the film surface decreased the friction force.

키워드

참고문헌

  1. Chou, S.Y., Krauss, P.R., and Renstrom, P.J., 'Nanoimprint Lithography', J of vacuum Science and Technology B, vol. 14, No. 6, pp. 4129-4133, 1996 https://doi.org/10.1116/1.588605
  2. Austin, M.D., Ge, H., Wu, W., Li, M., Yu, Z., Wasserman, D., Lyon, S.A., and Chou, S.Y., 'Fabrication of 5 nm Linewidth and 14 nm Pitch Features by Nanoimprint Lithography', Applied Physics Letters, vol. 84, No. 26, pp. 5299-5301 , 2004 https://doi.org/10.1063/1.1766071
  3. Zhang, W. and Chou, S.Y., 'Fabrication of 60-nm Transistors on 4-in. Wafer Using Nanoimprint at all Lithography Levels', Applied Physics Letters vol. 83, No. 8, pp. 1632-1634, 2003 https://doi.org/10.1063/1.1600505
  4. Chao, C. and Guo, L.J., 'Polymer Microring Resonators Fabricated by Nanoimprint Technique', J. of Vacuum Science and Technology B, vol. 20, No. 6, pp.2862-2866, 2002 https://doi.org/10.1116/1.1521729
  5. Arakcheeva, E.M., Tanklevskaya, E.M., Nesterov, S.I., Maksimov, M.V., Gurevich, S.A., Seekamp, J., and Torres, C.M.S., 'Fabrication of Semiconductorand Polymer-based Photonic Crystals Using Nanoimprint Lithography', Technical Physics, vol. 50, no. 8, pp. 1043-1047, 2005 https://doi.org/10.1134/1.2014536
  6. Ahn S W, Lee K D, Kim J S, Kim S H, Park J D, Lee S H, and Yoon P W, 'Fabrication of a 50 nm Half-pitch Wire Grid Polarizer Using Nanoimprint Lithography', Nanotechnology, vol. 16, No. 9, pp. 1874-1877, 2005 https://doi.org/10.1088/0957-4484/16/9/076
  7. Hirai, Y., Yoshida, S., and Takagi, N., 'Defect Analysis in Thermal Nanoimprint Lithography', J. of Vacuum Science and technology B, vol. 21, No. 6, pp. 2765-2770, 2003 https://doi.org/10.1116/1.1629289
  8. Hirai, Y., Yoshida, S., Takagi, N., Tanaka, Y., Yabe, H., Sasaki, K., Sumitani, H., and Yamamoto, K., 'High Aspect Pattem Fabrication by Nano Imprint Lithography Using Fine Diamond Mold', Japanese J. of Applied Physics Part 1, vol. 42, pp. 3863-3866, 2003 https://doi.org/10.1143/JJAP.42.3863
  9. Kang, J.H., Kim, K.S., and Kim, K.w., 'Molecular Dynamics Study of Pattem Transfer in Nanoimprint Lithography', Tribology Letters, vol. 25, No. 2, pp. 93-102, 2007 https://doi.org/10.1007/s11249-006-9053-4
  10. Jaszewski, R. w., Schift, H., Gröning, P., and Margaritondo, G, 'Properties of Thin Anti-adhesive Films used for the Replication of Microstructures in Polymers', Microelectronic Engineering, vol. 45, No. 1-4, pp. 381-384, 1997
  11. Bailey, T., Choi, B.J., Colbum, M., Meissl, M., Shaya, S., Ekerdt, J.G, Sreenivasan, S.V., and Willson, C. G, 'Step and Flash Imprint Lithography: Template Surface Treatrnent and Defect Analysis', J. of Vacuum Science and Technology B, vol. 18, No. 6, pp. 3572-3577, 2000 https://doi.org/10.1116/1.1324618
  12. Beck, M., Graczyk, M., Maximov. I., Sarwe, E. L., T. G I. Ling, Keil, M., and Montelius, L., 'Improving Stamps for 10 nm Level Wafer Scale Nanoimprint Lithography', Microelectronic Engineering, vol. 61-62, pp. 441-448, 2002 https://doi.org/10.1016/S0167-9317(02)00464-1
  13. Jung, GY., Li, Z., Wu, W., Chen, Y., Olynick, D.L., Wang, S.Y., Tong, W.M., and Williams, R.S., 'Vaporphase Self-assembled Monolayer for Improved Mold Release in Nanoimprint Lithography', Langmuir, vol. 21, pp. 1158-1161, 2005 https://doi.org/10.1021/la0476938
  14. Schift, H., Saxer, S., Park, S. G, Padeste, C., Pieles, U., and Gobrecht, J., 'Controlled Co-evaporation of Silanes for Nanoimprint Stamps', Nanotechnology, vol. 16, pp. S171-S175, 2005 https://doi.org/10.1088/0957-4484/16/5/007
  15. Chen, J. K., Ko, F. H., Hsieh, K. F., Chou, C. T., and Chang, F. C., 'Effect of Fluoroalkyl Substituents on the Reactions of Alkylchlorosilanes with Mold Surfaces for Nanoimprint Lithography', J. of Vacuum Science and Technology B, vol. 22, No. 6, pp. 3233-3241, 2004 https://doi.org/10.1116/1.1815305
  16. Park, S. G, Schift, H., Padeste, C., Schnyder, B., Kotz, R., and Gobrecht, Jens., 'Anti-adhesive Layers on Nickel Stamps for Nanoimprint Lithography', Microelectronic Engineering, vol. 73-74, pp. 196-201, 2004 https://doi.org/10.1016/S0167-9317(04)00098-X
  17. Kim, K.S., Kang, J.H., Choi, D.G, and Kim, K.W., 'Effects of the Anti-sticking Layer Derived from (lH,lH,2H,2H-perfluorooctyl) Trichlorosilane on Adhesion Between the Mold and Therrnoplastic Polymer Film in Therrnal Nanoimprint Lithography', Tribology International, submitted, 2009
  18. Choi, D.G, Jeong, J.H., Sim, Y. S., Lee, E.S., Kim, W.S., and Bae, B.S., 'Fluorinated Organic-inorganic Hybrid Mold as a New Stamp for Nanoimprint and Soft Lithography', Langmuir, vol. 21, No. 21, pp. 9390-9392, 2005 https://doi.org/10.1021/la0513205
  19. Tambe, N.S. and Bhushan, B., 'Scale Dependence of Micro/nano-friction and Adhesion of MEMSS/NEMS Materials, Coatings and Lubricants', Nanotechnology, vol. 15, pp. 1561-1570, 2004 https://doi.org/10.1088/0957-4484/15/11/033
  20. Tambe, N. S. and Bhushan, B., 'Micro/nanotribological characterization of PDMS and PMMA used for BioMEMS/NEMS Applications'. Ultramicroscopy Vol. 105, pp 238-247, 2005 https://doi.org/10.1016/j.ultramic.2005.06.050
  21. Bhushan, B. and Burton, Z., 'Adhesion and Friction Properties of Polymers in Microfluidic Devices', Nanotechnology, Vol. 16, pp. 467-478, 2005 https://doi.org/10.1088/0957-4484/16/4/023
  22. Hammerschmidt, J.A., Gladfelter, W.L., and Haugstad, G, 'Probing Polymer Viscoelastic Relaxations with Temperature-controlled Friction Force Microscopy', Macromolecules, Vol. 32, No. 10, pp. 3360-3367, 1999 https://doi.org/10.1021/ma981966m
  23. Zeng, H., Maeda, N., Chen, N., Tirrell, M., and Israelachvili, J., 'Adhesion and Friction of Polystyrene Surfaces Around T;', Macromolecules, Vol. 39, pp. 2350-2363, 2006 https://doi.org/10.1021/ma052207o
  24. Pocius, A.V.: Adhesion and Adhesives Technology: An Introduction, Hanser/Cardner Publications, Inc., New York 1997
  25. Briscoe, B.J. and Thomas, P.S., 'Structure-property Relationships in Thin Solid Poly(methyl methacrylate) Boundary Films', Tribology Transactions, Vol. 38, pp. 382-388, 1995 https://doi.org/10.1080/10402009508983418
  26. Briscoe, B.J., Akram, A., Adams, M.J., Johnson, S.A., and Gorrnan, D.M., 'The Influence of Solvent Quality on the Mechanical Properties of Thin Cast Isotactic Poly(methyl methacrylate) Coatings', J. of Materials Science, Vol. 37, pp. 4929-4936, 2002 https://doi.org/10.1023/A:1020895104449
  27. Kim, K.S, Ando, Y., and Kim, K.W., 'The Effect of Temperature on the Nano-scale Adhesion and Friction Behaviors of Therrnoplastic Polymer Films', Nanotechnology, Vol. 19, pp. 105701, 2008 https://doi.org/10.1088/0957-4484/19/10/105701
  28. Kim, K.S, Heo, J.C., and Kim, K.W., 'Effect of Temperature on the Micro-scale Adhesion Behavior of Therrnoplastic Polymer Film', J. of the KSTLE, Joumal of the KSTLE Vol. 25, No. 2, pp. 86-95, 2009
  29. Callister, W.D., Material science and engineering: an introduction, 5th edition, John Wiley & Sons, Inc., 2000, pp. 791-796
  30. Wei, G, Bhushan, B., Ferrell, N., and Hansford, D., 'Microfabrication and Nanomechanical Characterization of Polymer Microelectromechanical System for Biological Applications', J. of Vacuum Science and Technology B, Vol. 23, No. 4, pp. 811-819, 2005 https://doi.org/10.1116/1.1861937
  31. Sigma-Aldrich hompage, www.sigma-aldrich.com
  32. Saffman, P.G and Taylor G, 'The Penetration of a Fluid Into a Porous Medium or Hele-Shaw Cell Containing a More Viscous Liquid', Proceedings of the Royal Society of London, Series A, Mathematical and Physical Sciences, Vol. 245, No. 1242, pp. 312-329, 1958 https://doi.org/10.1098/rspa.1958.0085
  33. Zeng, H., Tian, Y., Zhao, B., Tirrell, M., and Israelachvili, J., 'Transient Interfacial Pattems and Instabilities Associated with Liquid Film Adhesion and Spreading', Langmuir, Vol. 23, pp. 6126-6135, 2007 https://doi.org/10.1021/la0632979
  34. Mary, P., Chateauminois, A., and Fretigny, C., 'Deformation of Elastic Coatings in Adhesive Contacts with Spherical Probes', J. of Physics D: Applied Physics, Vol. 39, pp. 3665-3673, 2006 https://doi.org/10.1088/0022-3727/39/16/021
  35. Zeng, H., Tian, Y., Zhao B., Tirrell, M., and Israelachvili, J., 'Transient Surface Pattems and Instabilities at Adhesive Junctions of Viscoelastic Films', Langmuir, Vol. 23, pp. 6126-6135, 2007 https://doi.org/10.1021/la0632979
  36. Bistac, S. and Schultz, J., 'Study of Solution-cast Films of PMMA by Dielectric Spectroscopy: Influence of the Nature of the Solvent on a and b Relaxations', International J. of Adhesion and Adhesives, Vol. 17, No. 3, pp. 197-201, 1997 https://doi.org/10.1016/S0143-7496(97)00001-8