Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Hydrogen Gas Sensing Characteristics of ZnO Wire-like Thin Films

나노선 형상의 산화아연 박막의 수소 가스 감지 특성

  • Nguyen, Le Hung (Department of Materials Science and Engineering, Chungnam National University) ;
  • Ahn, Eun-Seong (Department of Materials Science and Engineering, Chungnam National University) ;
  • Park, Seong-Yong (Department of Materials Science and Engineering, Chungnam National University) ;
  • Jung, Hoon-Chul (Department of Materials Science and Engineering, Chungnam National University) ;
  • Kim, Hyo-Jin (Department of Materials Science and Engineering, Chungnam National University) ;
  • Kim, Do-Jin (Department of Materials Science and Engineering, Chungnam National University)
  • 웬래훙 (충남대학교 공과대학 재료공학과) ;
  • 안은성 (충남대학교 공과대학 재료공학과) ;
  • 박성용 (충남대학교 공과대학 재료공학과) ;
  • 정훈철 (충남대학교 공과대학 재료공학과) ;
  • 김효진 (충남대학교 공과대학 재료공학과) ;
  • 김도진 (충남대학교 공과대학 재료공학과)
  • Published : 2009.08.27
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Abstract

ZnO wire-like thin films were synthesized through thermal oxidation of sputtered Zn metal films in dry air. Their nanostructure was confirmed by SEM, revealing a wire-like structure with a width of less than 100 nm and a length of several microns. The gas sensors using ZnO wire-like films were found to exhibit excellent $H_2$ gas sensing properties. In particular, the observed high sensitivity and fast response to $H_2$ gas at a comparatively low temperature of $200^{\circ}C$ would lead to a reduction in the optimal operating temperature of ZnO-based $H_2$ gas sensors. These features, together with the simple synthesis process, demonstrate that ZnO wire-like films are promising for fabrication of low-cost and high-performance $H_2$ gas sensors operable at low temperatures. The relationship between the sensor sensitivity and $H_2$ gas concentration suggests that the adsorbed oxygen species at the surface is $O^-$.

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References

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