반도체 전용기용 컨트롤러의 구조 안정화 설계

Design of a Controller for the Semiconductor Fabricator with Improved Stability

The manufacturing process of the semiconductor is guided by the controller, which is supposed to sense the unexpected shocks and/or vibrations to shutdown the hard disk and the whole system in order to prevent the malfunction. This feature of controller would shutdown the system due to the instability of the controller itself as well as the instability of the manufacturing system. And consequently will cause significant losses. In this study the structure of a controller has been investigated to find ways to suppress the vibrations from the structure. The frequency response test and the computer simulation has been implemented to find the structure with improved stability. The result of the study shows that the relatively simple design alterations can eliminate most of the vibrations.