참고문헌
- TFT-LCD Equipment Report, DisplaySearch, 2007
- 한혁, 서민호, '평판디스플레이 요소장비, LCD 장비,' KISTI TCI report, 2006
-
W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, and Y Tomita, 'A surfuce motor-driven planar motion stage integrated with an
$XY\theta_z$ https://doi.org/10.1016/j.precisioneng.2003.12.003surface encoder for precision positioning,' Precision Engineering, vol. 28, pp. 329-337, 2004 - 디지털 노광장비 핵심 기술 개발 기획 보고서, 지식경제부, 2008
- Y. Ogino, Y. Murakami, K. Ohishi, and M. Nakaoka, 'High perfonnance control in ultra-low speed range of inverter-fed linear induction motor using vector control scheme,' Proc. of the 5th Conf. Power Electronics and Applications, vol. 5, pp. 464-467,1993
- H. S. Hahn and J. L. Sanders, 'Perfonnance analysis of a LIMbased high-speed tool delivery system for machining,' Int. J. Prod Res., vol. 32, no. 1, pp. 179-207, 1994 https://doi.org/10.1080/00207549408956923
- I. Takahashi and M. Iwata, 'High resolution position control under 1 sec. of an induction motor with full digitized methods,' Proceedings of IEEE-IAS, pp. 632-638, 1989 https://doi.org/10.1109/IAS.1989.96715
- D. F. Spicer, J. N. Sackett, and C. T. Black, 'Precision X-Y positioning systems using linear induction motors,' lEE Colloquium on Limited Motion Electrical Actuation System, pp.6/1-6/3, 1998 https://doi.org/10.1049/ic:19980931
- F. J. Henley, 'Flat panel in-process test, repair and inspection : An overview,' SID Digest, pp. 623-627, 1992
- W. E. Hinds, Controlling movement oflinear induction motor, US Patent 6215260, 2001
- 정광석, 이상현, '대면적 비접촉 스테이지에의 구동기 적용을 위한 선형유도기의 변형된 2축 벡터 제어기,' 제어, 로봇, 시스템학회 논문지, 제14권 제4호, pp.385-391, 2008 https://doi.org/10.5302/J.ICROS.2008.14.4.385
- P. Vas, Sensorless Vector and Direct Torque Control, OXFORD University PRESS, 1996
- I. Takahashi and Y. Ide, 'Decoupling control of thrust and attractive force of a LIM using a space vector control inverter,' IEEE Transactions on Industry Application, vol. 29, no. 1, pp.161-167,1993 https://doi.org/10.1109/28.195902
- J. A. Santisteban and R. M. Stephan, 'Vector control methods for induction motor machines : An overview,'IEEE Transactions on Education, vol. 44, no. 2, pp. 170-175,2001 https://doi.org/10.1109/13.925828
피인용 문헌
- Screw Motion and Control of Conductive Rod by Rotating a Spiral Electrodynamic Wheel vol.17, pp.9, 2011, https://doi.org/10.5302/J.ICROS.2011.17.9.882