압전액추에이터를 이용한 차세대 유공압 밸브 기술

Hydraulic & Pneumatic Valve Technology using Piezoelectric Actuator for Next Generation

  • 발행 : 2009.06.01

초록

키워드

참고문헌

  1. K. Uchino, "Recent trend of piezoelectric actuator developments", Actuator 2000, pp. 34-39, 2000.
  2. M. Weinmann, et al., "Pneumatic silicon microvalves with piezoelectric actuation", Actuator 2000, pp. 224-227, 2000.
  3. K. Spanner, "Breakthrough in piezo actuator applications", Actuator 2000, pp. 236-241, 2000.
  4. R. Le Letty et al., "Valves based on amplified piezoelectric actuators", Actuator 2002, pp..141-144,.2002.
  5. M. Weinmann, et al., "State of the art in pneumatic microvalves", Actuator 2002, pp. 217-222, 2002.
  6. M. Weinmann, et al., " A 3/2 normally closed polymer piezoelectric microvalve with integrated mid electronics for industrial automation", Actuator 2002, pp. 533-536, 2002.
  7. A. J. Schmid, et al., "Piezoelectric microactuator with an integrated sensor to control the air flow in a micro valve", Actuator 2004, pp. 537-540, 2004.
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  9. M. weinmann, et al., "Piezoelectric pneumatic valves", Actuator 2006, pp. 181-184, 2006.
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