References
- Pronko, P. P., Dutta, S. K., Squier, J., Rudd, J. V., Du, D. and Mourou, G., "Machining of sub-micron holes using a femtosecond laser at 800nm," Opt. Comm., Vol. 114, Issues 1-2, pp. 106-110, 1995 https://doi.org/10.1016/0030-4018(94)00585-I
- Korte, F., Serbin, J., Koch, J., Egbert, A., Fallnich, C., Ostendorf, A. and Chichkov, B. N., "Towards nanostructuring with femtosecond laser pulses,"Applied Physics A: Materials Science & Processing, Vol. 77, Issue 2, pp. 229-235, 2003
- Koch, J., Fadeeva, E., Engelbrecht, M., Ruffert, C.,Gatzen, H. H., Ostendorf, A. and Chichkov, B. N.,"Maskless nonlinear lithography with femtosecond laser pulses," Applied Physics A: Materials Science & Processing, Vol. 82, Issue 1, pp. 23-26, 2006 https://doi.org/10.1007/s00339-005-3418-7
- Lin, Y., Hong, M. H., Wang, W. J., Law, Y. Z. and Chong, T. C., "Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser," Applied Physics A: Materials Science & Processing, Vol. 80, Issue 3, pp. 461-465, 2005 https://doi.org/10.1007/s00339-004-3093-0
- Sohn, I.-B., Lee, M.-S., Woo, J.-S., Lee, S.-M. and Chung, J.-Y., "Fabrication of photonic devices directly writtern within glass using a femtosecond laser," Optics Express, Vol. 13, No. 11, pp. 4224-4229, 2005 https://doi.org/10.1364/OPEX.13.004224
- Chung, I. Y., Kang, K. H., Kim, J. D., Sohn, I. B., Noh, Y. C. and Lee, J. M., "Femtosecond Pulsed Laser Ablation of OLED Shadow Mask Invar Alloy,"J. of KSPE, Vol. 24, No. 12, pp. 50-56, 2007
- Kawata, S., Sun, H. B., Tanaka, T. and Takada, K., "Finer feature for functional microdevices," Nature, Vol. 412, No. 6848, pp. 697-698, 2001 https://doi.org/10.1038/35089130
- Lee, S. W., Cho, M. J., Lee, S. K., Kong, H. J., Yang, D. Y., Park, S. H., Lim, T. W., Kim, R. H. and Lee, K. S, "Distortion of Structure in Two - Photon AbsorbedPhotopolymerizing Three Dimensional Fabrication," Optical Society of Korea Annual Meeting, pp. 46-47, 2005
- Maruo, S. and Kawata, S., "Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication," Journal of Microelectromechanical System, Vol. 7, No. 4, pp. 411-415, 1998 https://doi.org/10.1109/84.735349
- Maruo, S., Nakamura, O. and Kawata, S., "Threedimensional microfabrication with two-photonabsorbed photopoly-merization" Optics Letters, Vol. 22, No. 2, pp. 132-134, 1997 https://doi.org/10.1364/OL.22.000132