Journal of Integrative Natural Science (통합자연과학논문집)
- Volume 2 Issue 3
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- Pages.207-210
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- 2009
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- 3022-8883(pISSN)
Intercorrelation between Photonic Band and Etch Current on Rugate Photonic Crystals
Rugate 광결정에서 광학띠와 식각전류의 상관관계
- Park, Jongsun (Department of Applied Physic, Dankook University) ;
- Kim, Yongmin (Department of Applied Physic, Dankook University)
- Received : 2009.08.09
- Accepted : 2009.09.21
- Published : 2009.09.30
Abstract
Multiple rugate structures can be etched on a silicon wafer and placed in the same physical location, showing that many sharp spectral lines can be obtained in the optical reflectivity spectrum. Porous silicon samples were prepared by electrochemical etch of heavily doped p-type silicon wafers. The etching solution consisted of a 3:1 volume mixture of aqueous 48% hydrofluoric acid and absolute ethanol. Galvanostatic etch was carried out in a Teflon cell by using a two-electrode configuration with a Pt mesh counterelectrode. A sinusoidal current density waveform varying between 51.5 and