한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제42권2호
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  • Pages.73-78
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  • 2009
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
DOI QR코드

DOI QR Code

Si 함량에 따른 Ti-Al-Si-C-N 코팅막의 미세구조와 기계적 특성의 변화에 관한 연구

Effect of Si on the Microstructure and Mechanical Properties of Ti-Al-Si-C-N Coatings

  • 홍영수 (부산대학교 재료공학부) ;
  • 권세훈 (부산대학교 하이브리드소재 솔루션 국가핵심연구센터) ;
  • 김광호 (부산대학교 재료공학부)
  • Hong, Young-Su (School of Materials Science and Engineering, Pusan National University) ;
  • Kwon, Se-Hun (National Core Research Center for Hybrid Materials Solution, Pusan National University) ;
  • Kim, Kwang-Ho (School of Materials Science and Engineering, Pusan National University)
  • 발행 : 2009.04.30
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초록

Quinary Ti-Al-Si-C-N films were successfully synthesized on SUS 304 substrates and Si wafers by a hybrid coating system combining an arc ion plating technique and a DC reactive magnetron sputtering technique. In this work, the effect of Si content on the microstructure and mechanical properties of Ti-Al-C-N films were systematically investigated. It was revealed that the microstructure of Ti-Al-Si-C-N coatings changed from a columnar to a nano-composite by the Si addition. Due to the nanocomposite microstructure of Ti-Al-Si-C-N coatings, the microhardness of The Ti-Al-Si-C-N coatings significantly increased up to 56 GPa. In addition the average friction coefficients of Ti-Al-Si-C-N coatings were remarkably decreased with Si addition. Therefore, Ti-Al-Si-C-N coatings can be applicable as next-generation hard-coating materials due to their improved hybrid mechanical properties.

키워드

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