Light Effects of the Amorphous Indium Gallium Zinc Oxide Thin-Film Transistor

  • Lee, Keun-Woo (School of Electrical and Electronic Engineering, Yonsei University) ;
  • Shin, Hyun-Soo (School of Electrical and Electronic Engineering, Yonsei University) ;
  • Heo, Kon-Yi (School of Electrical and Electronic Engineering, Yonsei University) ;
  • Kim, Kyung-Min (School of Electrical and Electronic Engineering, Yonsei University) ;
  • Kim, Hyun-Jae (School of Electrical and Electronic Engineering, Yonsei University)
  • 발행 : 2009.12.31

초록

The optical and electrical properties of the amorphous indium gallium zinc oxide thin-film transistor ($\alpha$-IGZO TFT) were studied. When the $\alpha$-IGZO TFT was illuminated at a wavelength of 660 nm, the off-state drain current slightly increased, while below 550 nm it increased significantly. The $\alpha$-IGZO TFT was found to be extremely sensitive, with deep-level defects at approximately 2.25 eV near the midgap. After UV light illumination, a slight change occurred on the surface of the $\alpha$-IGZO films, such as in terms of the oxygen 1s spectra, resistivity, and carrier concentrations. It is believed that these results will provide information regarding the photo-induced behaviors in the $\alpha$-IGZO films.

키워드

참고문헌

  1. P. F. Carcia, R. S. McLean, M. H. Reilly, and G. Nunes, Jr., Appl. Phys. Lett. 82, 1117 (2003) https://doi.org/10.1063/1.1553997
  2. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature 432, 4 (2004) https://doi.org/10.1038/432004a
  3. B. D. Ahn, H. S. Shin, H. J. Kim, J. S. Park, and J. K. Jeong, Appl. Phys. Lett. 93, 203506 (2008) https://doi.org/10.1063/1.3028340
  4. C. S. Chuang, T. C. Fung, K. Nomura, B. G. Mullins, H. P. D. Shieh, H. Hosono, and J. Kanicki, Society for information Display International Symposium (2008), p. 453
  5. K. W. Lee, K. Y. Heo, and H. J. Kim, Appl. Phys. Lett. 94, 102112 (2009)
  6. P. Bhattacharya, Semiconductor Optoelectronic Devices (Englewood Cliffs, NJ: Prentice-Hall, 1997)
  7. M. N. Islam, T.B. Ghosh, K.L. Chopra, and H.N. Acharya, Thin Solid Films 280, 20 (1997)
  8. J.C.C. Fan and J.B. Goodenough, J. Appl. Phys. 48, 3524 (1977) https://doi.org/10.1063/1.324149