Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Properties of Hydorogenated Al-Doped ZnO Films by Multi-Step Texture

다단계 습식 식각을 통한 수소처리된 Al-doped ZnO 박막의 특성

  • Tark, Sung-Ju (Department of Materials Science and Engineering, Korea University) ;
  • Kang, Min-Gu (Department of Materials Science and Engineering, Korea University) ;
  • Park, Sun-Geun (Department of Materials Science and Engineering, Korea University) ;
  • Kim, Yong-Hyun (Department of Materials Science and Engineering, Korea University) ;
  • Kim, Won-Mok (Thin Film Materials Research Center, Division of Materials, Korea Institute of Science and Technology) ;
  • Kim, Dong-Hwan (Department of Materials Science and Engineering, Korea University)
  • 탁성주 (고려대학교 신소재공학과) ;
  • 강민구 (고려대학교 신소재공학과) ;
  • 박성은 (고려대학교 신소재공학과) ;
  • 김용현 (고려대학교 신소재공학과) ;
  • 김원목 (한국과학기술연구원 재료연구부 박막재료연구센터) ;
  • 김동환 (고려대학교 신소재공학과)
  • Published : 2009.05.27
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Abstract

In this study we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by rf magnetron sputtering. AZO films on glass were prepared by changing the $H_2/(Ar+H_2)$ ratio at a low temperature of $150^{\circ}C$. The prepared HAZO films showed lower resistivity and higher carrier concentration and mobility than those of non-hydrogenated AZO films. After deposition, the surface of the HAZO films was multi-step textured in diluted HCl (0.5%) for the investigation of the change in the optical properties and the surface morphology due to etching. As a result, the HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 52.3%.

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References

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