반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

유기EL 증착 공정에 대한 3차원 Monte Carlo 해석

Three Dimensional Direct Monte Carlo Simulation on OLED Evaporation Process

  • 이응기 (공주대학교 기계자동차공학부)
  • Lee, Eung-Ki (Kongju National University, Division of Mechanical & Automotive Engineering)
  • 발행 : 2009.12.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

The performance of an OLED(organic luminescent emitting device) fabrication system strongly depends on the design of the evaporation cell-source. Trends in display sizes have hauled the enlargement of mother glass substrates. The enlargement of substrates requires the improvement and the enlargement of the effusion cell-source for OLED evaporation process. The deposited layers should be as uniform as possible, and therefore it is important to know the effusion profile of the molecules emitted from the cell-source. Conventional 2D DSMC algorithm cannot be used for simulating the new concept cell-source design, such as a linear source. This work concerns the development of 3D DSMC (direct simulation Monte Carlo) analysis for simulating the behavior of the evaporation cell-sources. In this paper, the 3D DSMC algorithm was developed and the film thickness profiles were obtained by the numerical analysis.

키워드

참고문헌

  1. Heon Lee, Sunghoon Hong, Kiyeon Yang, and Kyungwoo Choi, “Fabrication of Nano-sized Resist Patterns on Flexible Plastic Film using Thermal Curing Nanoimprint Lithography,” Microelectronic Engineering Vol. 83, pp. 323-327, 2006. https://doi.org/10.1016/j.mee.2005.09.006
  2. Michael S. Arnold, Gregory J. McGraw, Stephen R. Forrest, and Richard R. Lunt, “Direct Vapor Jet Printing of Three Color Segment Organic Light Emitting Devices for White Light Illumination,” Applied Physics Letters, Vol. 92, No. 5, pp. 3301, 2008.
  3. 이응기, “대면적 유기EL 양산 장비 개발을 위한 증착공정 모델링,” 반도체및디스플레이장비학회지, 제5권, 제4호, pp. 29-34, 2006.
  4. Sang Chul Lim, Seong Hyun Kim, Hye Yong Chu, Jung Hun Lee, Jeong-Ik Lee, Ji Young Oh, Dojin Kim, and Taehyoung Zyung, “New Method of Driving OLED with an OTFT,” Synththic Metals, Vol. 151, pp. 197-201, 2005. https://doi.org/10.1016/j.synthmet.2005.04.008
  5. Milton S. Hess and John F. Mikosky, “Vapor Deposition of Platinum using cw Laser Energy,” Journal of Applied Physics, Vol. 43, No. 11, pp. 4680-4683, 1972. https://doi.org/10.1063/1.1660988
  6. Eungki Lee, “Simulation of the Thin-film Thickness Distribution for an OLED Thermal Evaporation Process,” Vacuum, Vol. 83, pp. 848-852, 2009. https://doi.org/10.1016/j.vacuum.2008.08.007
  7. Spencer E. Olson and Andrew J. Christlieb, “Gridless DSMC,” Journal of Computational Physics, Vol. 227, pp. 8035-8064, 2008. https://doi.org/10.1016/j.jcp.2008.04.038
  8. J. B. Anderson and J. B. Fenn, “Velocity Distributions in Molecular Beams from Nozzle Sources,” The Physics of Fluids, Vol. 6, No. 5, pp.780-787, 1965.
  9. P. S. Prasanth and Jose K. Kakkassery, “Molecular Models for Simulation of Rarefied Gas Flows using Direct Simulation Monte Carlo Method,” Fluid Dynamics Research, Vol. 40, pp. 233-252, 2008. https://doi.org/10.1016/j.fluiddyn.2007.10.001