Laser Solutions (한국레이저가공학회지)
- Volume 12 Issue 4
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- Pages.1-5
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- 2009
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- 1229-0963(pISSN)
Numerical Analysis of UV Laser Patterning of Polymeric Thin-Film
자외선 레이저를 이용한 폴리머 박막 가공의 수치해석
Abstract
Conventional patterning based on wet-process for multi-layered film is a relatively complex and costly process though it is a necessary step for fabrication of TFT-LCD module. Recently, a direct pattering by laser has been studied because it is low cost and simple process compared to the wet process. In this work, the selective removal process of multi-layered film (polyimide/indium tin oxide/glass) is studied by modeling the thermal and mechanical behavior for multi-layered structure. Especially, the effects of thickness of polyimide layer are examined.