Abstract
For the investigation of the oxidation behavior for titanium metal at various temperatures, titanium specimens were heated for 2 hours in the range of $300{\sim}1000^{\circ}C$, individually. And then X-ray diffraction(XRD), scanning electron microscopy (SEM)/energy dispersive spectroscopy (EDS) and attenuated total reflection-Fourier transform infrared (ATR-FTIR) spectroscopic analyses were carried out. At $300^{\circ}C$, infrared absorption bands on the surface of the titanium specimen were shown in a spectrum by the oxygen uptake of titanium metal(hexagonal). At increased temperature, not only infrared absorption bands but also X-ray diffraction peaks for the titanium oxide were grown and shifted to low wave number ($cm^{-1}$) and angle($^{\circ}$) due to the more oxygen diffusion into titanium metal. At $700^{\circ}C$, $Ti_3O$ (hexagonal phase) was identified by X-ray diffractometer. $TiO_2$ (rutile, tetragonal phase) layer was produced on the surface of the specimen below $1{\mu}m$ in thickness at $600^{\circ}C$, and grown about $2{\mu}m$ at $700^{\circ}C$ and with $110{\mu}m$ in thickness at $1000^{\circ}C$. Above $900^{\circ}C$, (110) plane of the crystal on the surface of rutile-$TiO_2$ layer was grown.
온도에 따른 티타늄금속의 산화거동을 조사하기 위하여 금속시편을 각각의 온도($300{\sim}1000^{\circ}C$)에서 2시간 동안 가열한 후, 생성된 산화시편의 표면에 대하여 X-선 회절(XRD)분석, 주사전자현미경 (SEM)/energy dispersive spectroscopy (EDS) 분석과 감쇠된 전반사(ATR) Fourier 변환 적외선(FT-IR) 분광 분석을 수행하였다. $300^{\circ}C$에서 대기 중의 산소가 티타늄 금속(hexagonal) 표면층으로 확산되어 적외선 흡수띠가 검출되었으며 온도가 높아짐에 따라 확산되는 산소 양이 증가하여 적외선 흡수띠와 X-선 회절 피크의 이동(shift) 현상이 나타났고 $700^{\circ}C$에서 XRD에 의해 $Ti_3O$ (hexagonal)의 생성이 확인되었다. 티타늄 금속 표면에 $TiO_2$ (rutile, tetragonal) 산화층이 생성되기 시작한 온도는 $600^{\circ}C$ 이었으며 이때 두께가 $1{\mu}m$ 이하 수준이었으나 $700^{\circ}C$에서는 약 $2{\mu}m$로 두꺼워졌고 $1000^{\circ}C$에서는 약 $110{\mu}m$ 두께에 달했다. 또한 $900^{\circ}C$ 이상의 온도에서 $TiO_2$ (rutile) 산화층 표면은 (110) 면의 방향으로 결정이 성장하였다.
