References
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- Yole development, http://www.yole.fr
- Alcatel Micro Machining Systems, http://www.alcatelmicromachining.com
- Xsil, http://www.xsil.com
- Lee, J., Sohn, H., Kim, J. and Shin, D., "Advanced Laser Micromachining Technology," J. of the KSPE, Vol. 23, No.1, pp. 13-22, 2006
- Coherent Inc, http://www.coherent.com
- Duley, "UV Lasers: effects and applications in materials science," Cambridge, pp. 148-199, 1996
- Shin, D., Suh, J. and Lee, J., "Fabrication of Through Silicon Via using Hybrid process," Korea Patent No. 0103681, 2009