다이어몬드 공구를 이용한 Ni 도금층의 정밀미세가공 시 절삭성

Machinability in Micro-precision Machining of Ni-Plated Layer by Diamond Tool

  • 김선아 (인천대학교 기계공학과 대학원) ;
  • 박동삼 (인천대학교 기계공학과)
  • 발행 : 2009.12.15

초록

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

키워드

참고문헌

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